JPH0473631B2 - - Google Patents

Info

Publication number
JPH0473631B2
JPH0473631B2 JP59008787A JP878784A JPH0473631B2 JP H0473631 B2 JPH0473631 B2 JP H0473631B2 JP 59008787 A JP59008787 A JP 59008787A JP 878784 A JP878784 A JP 878784A JP H0473631 B2 JPH0473631 B2 JP H0473631B2
Authority
JP
Japan
Prior art keywords
pressure sensor
wiring
strain gauge
type
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP59008787A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60153176A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59008787A priority Critical patent/JPS60153176A/ja
Publication of JPS60153176A publication Critical patent/JPS60153176A/ja
Publication of JPH0473631B2 publication Critical patent/JPH0473631B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59008787A 1984-01-20 1984-01-20 圧覚センサ Granted JPS60153176A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59008787A JPS60153176A (ja) 1984-01-20 1984-01-20 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59008787A JPS60153176A (ja) 1984-01-20 1984-01-20 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60153176A JPS60153176A (ja) 1985-08-12
JPH0473631B2 true JPH0473631B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=11702573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59008787A Granted JPS60153176A (ja) 1984-01-20 1984-01-20 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60153176A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2560721Y2 (ja) * 1991-03-19 1998-01-26 昭和アルミニウム株式会社 照明器具

Also Published As

Publication number Publication date
JPS60153176A (ja) 1985-08-12

Similar Documents

Publication Publication Date Title
EP0735352B1 (en) Force transducer and method of fabrication thereof
US4071838A (en) Solid state force transducer and method of making same
US7509859B2 (en) Acceleration sensor with redundant contact holes
US4050049A (en) Solid state force transducer, support and method of making same
JPH0473631B2 (enrdf_load_stackoverflow)
JPH0473630B2 (enrdf_load_stackoverflow)
JPH05281251A (ja) 加速度センサおよびその製造方法
JP3282570B2 (ja) 半導体加速度センサ
JPH0564863B2 (enrdf_load_stackoverflow)
JPH0473629B2 (enrdf_load_stackoverflow)
JPH05340956A (ja) 加速度センサ
JPS60153175A (ja) 圧覚センサ
JPH05340957A (ja) 半導体センサの製造方法および半導体センサ
JPH0197827A (ja) 半導体拡散型力覚センサ
JPH0676929B2 (ja) 分布型圧覚センサ
JPH04204128A (ja) 応力センサ及びその製造方法
JP2844116B2 (ja) 物理量を検出するセンサの製造方法
JPH01162159A (ja) 半導体加速度センサ
JPS62266875A (ja) 半導体圧力センサ
JP2587255B2 (ja) 力検出装置
JPH0546889B2 (enrdf_load_stackoverflow)
JPH0446464B2 (enrdf_load_stackoverflow)
JPH0294666A (ja) 半導体センサと半導体歪みゲージの製造方法
JPH04323566A (ja) 半導体加速度センサ
JPH01131425A (ja) 力検出装置