JPH0560269B2 - - Google Patents

Info

Publication number
JPH0560269B2
JPH0560269B2 JP59016771A JP1677184A JPH0560269B2 JP H0560269 B2 JPH0560269 B2 JP H0560269B2 JP 59016771 A JP59016771 A JP 59016771A JP 1677184 A JP1677184 A JP 1677184A JP H0560269 B2 JPH0560269 B2 JP H0560269B2
Authority
JP
Japan
Prior art keywords
pressure
force
receiving surface
sensitive
directions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59016771A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60160672A (ja
Inventor
Teizo Takahama
Mitsuo Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59016771A priority Critical patent/JPS60160672A/ja
Publication of JPS60160672A publication Critical patent/JPS60160672A/ja
Publication of JPH0560269B2 publication Critical patent/JPH0560269B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Pressure Sensors (AREA)
JP59016771A 1984-01-31 1984-01-31 圧覚センサアレイ Granted JPS60160672A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59016771A JPS60160672A (ja) 1984-01-31 1984-01-31 圧覚センサアレイ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59016771A JPS60160672A (ja) 1984-01-31 1984-01-31 圧覚センサアレイ

Publications (2)

Publication Number Publication Date
JPS60160672A JPS60160672A (ja) 1985-08-22
JPH0560269B2 true JPH0560269B2 (enrdf_load_stackoverflow) 1993-09-01

Family

ID=11925474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59016771A Granted JPS60160672A (ja) 1984-01-31 1984-01-31 圧覚センサアレイ

Country Status (1)

Country Link
JP (1) JPS60160672A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7334489B2 (en) * 2005-08-10 2008-02-26 Custom Sensors & Technologies, Inc. Dual rate force transducer
JP5156311B2 (ja) * 2007-09-19 2013-03-06 本田技研工業株式会社 搬送システム及び接触センサ
JP2013257267A (ja) * 2012-06-14 2013-12-26 Seiko Epson Corp 力検出モジュール、力検出装置及びロボット
EP4176239A4 (en) * 2020-07-28 2023-08-16 Shanghai Flexiv Robotics Technology Co., Ltd. TORQUE AND FORCE SENSOR WITH MULTIPLE DEGREES OF FREEDOM AND ROBOT

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS598782A (ja) * 1982-07-08 1984-01-18 Fuji Photo Film Co Ltd 放射線増感スクリ−ン

Also Published As

Publication number Publication date
JPS60160672A (ja) 1985-08-22

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