JPS60153172A - 圧覚センサ - Google Patents

圧覚センサ

Info

Publication number
JPS60153172A
JPS60153172A JP59008783A JP878384A JPS60153172A JP S60153172 A JPS60153172 A JP S60153172A JP 59008783 A JP59008783 A JP 59008783A JP 878384 A JP878384 A JP 878384A JP S60153172 A JPS60153172 A JP S60153172A
Authority
JP
Japan
Prior art keywords
pressure
strain gauges
pressure sensor
sensor unit
force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59008783A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0473629B2 (enrdf_load_stackoverflow
Inventor
Teizo Takahama
高浜　禎造
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Corporate Research and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Corporate Research and Development Ltd filed Critical Fuji Electric Corporate Research and Development Ltd
Priority to JP59008783A priority Critical patent/JPS60153172A/ja
Publication of JPS60153172A publication Critical patent/JPS60153172A/ja
Publication of JPH0473629B2 publication Critical patent/JPH0473629B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00—Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50—Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Pressure Sensors (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
JP59008783A 1984-01-20 1984-01-20 圧覚センサ Granted JPS60153172A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59008783A JPS60153172A (ja) 1984-01-20 1984-01-20 圧覚センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59008783A JPS60153172A (ja) 1984-01-20 1984-01-20 圧覚センサ

Publications (2)

Publication Number Publication Date
JPS60153172A true JPS60153172A (ja) 1985-08-12
JPH0473629B2 JPH0473629B2 (enrdf_load_stackoverflow) 1992-11-24

Family

ID=11702468

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59008783A Granted JPS60153172A (ja) 1984-01-20 1984-01-20 圧覚センサ

Country Status (1)

Country Link
JP (1) JPS60153172A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153171A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd ２セル型圧覚センサ
JPS63155677A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 触覚センサと基板の接続方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153171A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd ２セル型圧覚センサ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153171A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd ２セル型圧覚センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60153171A (ja) * 1984-01-20 1985-08-12 Fuji Electric Corp Res & Dev Ltd ２セル型圧覚センサ
JPS63155677A (ja) * 1986-12-19 1988-06-28 Agency Of Ind Science & Technol 触覚センサと基板の接続方法

Also Published As

Publication number Publication date
JPH0473629B2 (enrdf_load_stackoverflow) 1992-11-24

Similar Documents

Publication Publication Date Title
US7578162B2 (en) Apparatus for detecting a physical quantity acting as an external force and method for testing and manufacturing this apparatus
US6512364B1 (en) Testing sensor
CN1028447C (zh) 集成复合传感器以及使用该集成复合传感器的静压和差压传送器
US7428841B2 (en) Acceleration sensor and inclination-detecting method
US4683755A (en) Biaxial strain gage systems
JP4431475B2 (ja) 半導体型３軸加速度センサ
US20030177832A1 (en) Acceleration sensor
JPS60161539A (ja) 圧覚認識制御装置
JPS60153172A (ja) 圧覚センサ
CN117629492A (zh) 一种基于mems工艺的硅压阻式六维力传感器及其制备方法
JP2006098323A (ja) 半導体型３軸加速度センサ
JPH0739975B2 (ja) 分布型触覚センサ
JPH01287470A (ja) 半導体加速度センサ
JPH0197827A (ja) 半導体拡散型力覚センサ
JPH0560269B2 (enrdf_load_stackoverflow)
JPS61224465A (ja) 力センサ及びその製造方法
WO2011078715A1 (ru) Способ измерений физических величин пьезорезистивными преобразователями и преобразователь
JPS60153175A (ja) 圧覚センサ
JPS60153173A (ja) 圧覚センサ
JPS6093933A (ja) 荷重計
JPH0793445B2 (ja) 圧覚センサ
JPH0473303B2 (enrdf_load_stackoverflow)
CN119984615A (zh) 多维力传感器及加工方法
JPH0473634B2 (enrdf_load_stackoverflow)
JPS61284390A (ja) 触覚センサ