JPS60144933A - 液相成長装置 - Google Patents

液相成長装置

Info

Publication number
JPS60144933A
JPS60144933A JP60384A JP60384A JPS60144933A JP S60144933 A JPS60144933 A JP S60144933A JP 60384 A JP60384 A JP 60384A JP 60384 A JP60384 A JP 60384A JP S60144933 A JPS60144933 A JP S60144933A
Authority
JP
Japan
Prior art keywords
solution
slider
source
wafer
solute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60384A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0464174B2 (enrdf_load_stackoverflow
Inventor
Yasuo Shinohara
篠原　庸雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP60384A priority Critical patent/JPS60144933A/ja
Publication of JPS60144933A publication Critical patent/JPS60144933A/ja
Publication of JPH0464174B2 publication Critical patent/JPH0464174B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02367—Substrates
    • H01L21/0237—Materials
    • H01L21/02387—Group 13/15 materials
    • H01L21/02392—Phosphides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02625—Liquid deposition using melted materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02623—Liquid deposition
    • H01L21/02628—Liquid deposition using solutions

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Semiconductor Lasers (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP60384A 1984-01-06 1984-01-06 液相成長装置 Granted JPS60144933A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60384A JPS60144933A (ja) 1984-01-06 1984-01-06 液相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60384A JPS60144933A (ja) 1984-01-06 1984-01-06 液相成長装置

Publications (2)

Publication Number Publication Date
JPS60144933A true JPS60144933A (ja) 1985-07-31
JPH0464174B2 JPH0464174B2 (enrdf_load_stackoverflow) 1992-10-14

Family

ID=11478305

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60384A Granted JPS60144933A (ja) 1984-01-06 1984-01-06 液相成長装置

Country Status (1)

Country Link
JP (1) JPS60144933A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840806A (enrdf_load_stackoverflow) * 1971-09-21 1973-06-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840806A (enrdf_load_stackoverflow) * 1971-09-21 1973-06-15

Also Published As

Publication number Publication date
JPH0464174B2 (enrdf_load_stackoverflow) 1992-10-14

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