JPS5776828A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5776828A JPS5776828A JP15311280A JP15311280A JPS5776828A JP S5776828 A JPS5776828 A JP S5776828A JP 15311280 A JP15311280 A JP 15311280A JP 15311280 A JP15311280 A JP 15311280A JP S5776828 A JPS5776828 A JP S5776828A
- Authority
- JP
- Japan
- Prior art keywords
- inp
- substrate
- volatile element
- growing
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/40—AIIIBV compounds wherein A is B, Al, Ga, In or Tl and B is N, P, As, Sb or Bi
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Semiconductor Lasers (AREA)
- Led Devices (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE:To prevent evaporation of volatile element in epitaxial growing of a compound semiconductor, by arranging supplying bodies including volatile element of a substrate under the compound semiconductor substrate, and keeping vapor pressure of the volatile element at a thermal equilibrium state during the thermal cycle of liquid phase growth. CONSTITUTION:In the case one layer on InP is grown, InP crystal lumps 5 are placed in a InP crystal lump placing part 4 in a carbon table 1, the InP substrate 7 is provided in the substrate placing part 4, and In+P melt 8 for growing is set in a melt reservoir in a slider 6. The epitaxial growing of InP is performed by sliding the silder 6 in the direction of an arrow. During the thermal cycle for the epitaxial growth of InP, P vapor generated from the InP crystal lumps 5 is supplied to the surface of the InP substrate 7 through a supply port 2. The surface is always filled with P vapor which is in the state of thermal equilibrium. In this method, evaporation of P from the surface of the InP substrate and the epitaxially grown surface can be prevented.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15311280A JPS5776828A (en) | 1980-10-31 | 1980-10-31 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15311280A JPS5776828A (en) | 1980-10-31 | 1980-10-31 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5776828A true JPS5776828A (en) | 1982-05-14 |
Family
ID=15555228
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15311280A Pending JPS5776828A (en) | 1980-10-31 | 1980-10-31 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5776828A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6030121A (en) * | 1983-07-28 | 1985-02-15 | Nec Corp | Crystal growth of ingaasp on inp |
-
1980
- 1980-10-31 JP JP15311280A patent/JPS5776828A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6030121A (en) * | 1983-07-28 | 1985-02-15 | Nec Corp | Crystal growth of ingaasp on inp |
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