JPS535966A - Device for effecting liquid-phase epitaxial growth - Google Patents
Device for effecting liquid-phase epitaxial growthInfo
- Publication number
- JPS535966A JPS535966A JP7982076A JP7982076A JPS535966A JP S535966 A JPS535966 A JP S535966A JP 7982076 A JP7982076 A JP 7982076A JP 7982076 A JP7982076 A JP 7982076A JP S535966 A JPS535966 A JP S535966A
- Authority
- JP
- Japan
- Prior art keywords
- molten liquid
- epitaxial growth
- phase epitaxial
- effecting liquid
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To immerse a semiconductor substrate which is arranged opposite to a flat plate at a narrow space in a crucible in which a molten liquid for epitaxial growth is accommodated in such a way that its lower portion comes in contact with the molten liquid and permit the molten liquid to be deposited to the face of the substrate making use of capillarity, whereby it is possible to simultaneously form a grown layer having an uniform thickness on a plurality of substrates from one molten liquid.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7982076A JPS535966A (en) | 1976-07-07 | 1976-07-07 | Device for effecting liquid-phase epitaxial growth |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7982076A JPS535966A (en) | 1976-07-07 | 1976-07-07 | Device for effecting liquid-phase epitaxial growth |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS535966A true JPS535966A (en) | 1978-01-19 |
Family
ID=13700828
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7982076A Pending JPS535966A (en) | 1976-07-07 | 1976-07-07 | Device for effecting liquid-phase epitaxial growth |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS535966A (en) |
-
1976
- 1976-07-07 JP JP7982076A patent/JPS535966A/en active Pending
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