JPS535966A - Device for effecting liquid-phase epitaxial growth - Google Patents

Device for effecting liquid-phase epitaxial growth

Info

Publication number
JPS535966A
JPS535966A JP7982076A JP7982076A JPS535966A JP S535966 A JPS535966 A JP S535966A JP 7982076 A JP7982076 A JP 7982076A JP 7982076 A JP7982076 A JP 7982076A JP S535966 A JPS535966 A JP S535966A
Authority
JP
Japan
Prior art keywords
molten liquid
epitaxial growth
phase epitaxial
effecting liquid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7982076A
Other languages
Japanese (ja)
Inventor
Tsuguo Fukuda
Hitoshi Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP7982076A priority Critical patent/JPS535966A/en
Publication of JPS535966A publication Critical patent/JPS535966A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To immerse a semiconductor substrate which is arranged opposite to a flat plate at a narrow space in a crucible in which a molten liquid for epitaxial growth is accommodated in such a way that its lower portion comes in contact with the molten liquid and permit the molten liquid to be deposited to the face of the substrate making use of capillarity, whereby it is possible to simultaneously form a grown layer having an uniform thickness on a plurality of substrates from one molten liquid.
COPYRIGHT: (C)1978,JPO&Japio
JP7982076A 1976-07-07 1976-07-07 Device for effecting liquid-phase epitaxial growth Pending JPS535966A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7982076A JPS535966A (en) 1976-07-07 1976-07-07 Device for effecting liquid-phase epitaxial growth

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7982076A JPS535966A (en) 1976-07-07 1976-07-07 Device for effecting liquid-phase epitaxial growth

Publications (1)

Publication Number Publication Date
JPS535966A true JPS535966A (en) 1978-01-19

Family

ID=13700828

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7982076A Pending JPS535966A (en) 1976-07-07 1976-07-07 Device for effecting liquid-phase epitaxial growth

Country Status (1)

Country Link
JP (1) JPS535966A (en)

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