JPS60139007A - 電子線描画装置 - Google Patents
電子線描画装置Info
- Publication number
- JPS60139007A JPS60139007A JP58244496A JP24449683A JPS60139007A JP S60139007 A JPS60139007 A JP S60139007A JP 58244496 A JP58244496 A JP 58244496A JP 24449683 A JP24449683 A JP 24449683A JP S60139007 A JPS60139007 A JP S60139007A
- Authority
- JP
- Japan
- Prior art keywords
- amplifier
- current
- deflection
- switch
- deflecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Amplifiers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244496A JPS60139007A (ja) | 1983-12-27 | 1983-12-27 | 電子線描画装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58244496A JPS60139007A (ja) | 1983-12-27 | 1983-12-27 | 電子線描画装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60139007A true JPS60139007A (ja) | 1985-07-23 |
| JPH0576204B2 JPH0576204B2 (enExample) | 1993-10-22 |
Family
ID=17119527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58244496A Granted JPS60139007A (ja) | 1983-12-27 | 1983-12-27 | 電子線描画装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60139007A (enExample) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007141781A (ja) * | 2005-11-22 | 2007-06-07 | Hitachi High-Technologies Corp | 電磁偏向回路を有する走査電子線装置 |
| US7248254B2 (en) | 2002-09-19 | 2007-07-24 | Nec Electronics Corporation | Gamma correcting circuit and panel drive apparatus equipped with gamma correcting circuit |
| JP2014093211A (ja) * | 2012-11-05 | 2014-05-19 | Jeol Ltd | 荷電粒子ビームの偏向装置及びそれを備えた荷電粒子ビーム装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109436U (enExample) * | 1976-02-17 | 1977-08-19 | ||
| JPS5769322U (enExample) * | 1980-10-15 | 1982-04-26 |
-
1983
- 1983-12-27 JP JP58244496A patent/JPS60139007A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52109436U (enExample) * | 1976-02-17 | 1977-08-19 | ||
| JPS5769322U (enExample) * | 1980-10-15 | 1982-04-26 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7248254B2 (en) | 2002-09-19 | 2007-07-24 | Nec Electronics Corporation | Gamma correcting circuit and panel drive apparatus equipped with gamma correcting circuit |
| JP2007141781A (ja) * | 2005-11-22 | 2007-06-07 | Hitachi High-Technologies Corp | 電磁偏向回路を有する走査電子線装置 |
| JP2014093211A (ja) * | 2012-11-05 | 2014-05-19 | Jeol Ltd | 荷電粒子ビームの偏向装置及びそれを備えた荷電粒子ビーム装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0576204B2 (enExample) | 1993-10-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |