JPS60124314A - 透明導電フィルムの製造法 - Google Patents
透明導電フィルムの製造法Info
- Publication number
- JPS60124314A JPS60124314A JP23224383A JP23224383A JPS60124314A JP S60124314 A JPS60124314 A JP S60124314A JP 23224383 A JP23224383 A JP 23224383A JP 23224383 A JP23224383 A JP 23224383A JP S60124314 A JPS60124314 A JP S60124314A
- Authority
- JP
- Japan
- Prior art keywords
- conductive film
- film
- transparent conductive
- resistance
- sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- 238000004544 sputter deposition Methods 0.000 claims description 13
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000007789 gas Substances 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052738 indium Inorganic materials 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- 239000004721 Polyphenylene oxide Substances 0.000 claims description 2
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 2
- 229920000570 polyether Polymers 0.000 claims description 2
- 239000010408 film Substances 0.000 description 55
- 239000000758 substrate Substances 0.000 description 24
- 239000004973 liquid crystal related substance Substances 0.000 description 12
- 239000003513 alkali Substances 0.000 description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 11
- 239000001301 oxygen Substances 0.000 description 11
- 229910052760 oxygen Inorganic materials 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 8
- 239000002585 base Substances 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 230000008021 deposition Effects 0.000 description 6
- 229920006267 polyester film Polymers 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 229920006393 polyether sulfone Polymers 0.000 description 3
- 239000004695 Polyether sulfone Substances 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000013076 target substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Liquid Crystal (AREA)
- Manufacturing Of Electric Cables (AREA)
- Physical Vapour Deposition (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Non-Insulated Conductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23224383A JPS60124314A (ja) | 1983-12-10 | 1983-12-10 | 透明導電フィルムの製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP23224383A JPS60124314A (ja) | 1983-12-10 | 1983-12-10 | 透明導電フィルムの製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60124314A true JPS60124314A (ja) | 1985-07-03 |
| JPH0345485B2 JPH0345485B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-11 |
Family
ID=16936212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP23224383A Granted JPS60124314A (ja) | 1983-12-10 | 1983-12-10 | 透明導電フィルムの製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60124314A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60230307A (ja) * | 1984-04-26 | 1985-11-15 | 東洋紡績株式会社 | 透明導電膜 |
| JPS63454A (ja) * | 1986-06-20 | 1988-01-05 | Konica Corp | 透明導電性フイルムの製造方法 |
-
1983
- 1983-12-10 JP JP23224383A patent/JPS60124314A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60230307A (ja) * | 1984-04-26 | 1985-11-15 | 東洋紡績株式会社 | 透明導電膜 |
| JPS63454A (ja) * | 1986-06-20 | 1988-01-05 | Konica Corp | 透明導電性フイルムの製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0345485B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-07-11 |
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