JPS60123708A - 磁気デイスクの表面欠陥検査方法および装置 - Google Patents

磁気デイスクの表面欠陥検査方法および装置

Info

Publication number
JPS60123708A
JPS60123708A JP23136283A JP23136283A JPS60123708A JP S60123708 A JPS60123708 A JP S60123708A JP 23136283 A JP23136283 A JP 23136283A JP 23136283 A JP23136283 A JP 23136283A JP S60123708 A JPS60123708 A JP S60123708A
Authority
JP
Japan
Prior art keywords
light
photoelectric conversion
optical system
magnetic disk
shielding optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23136283A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0315962B2 (enrdf_load_stackoverflow
Inventor
Mitsuyoshi Koizumi
小泉　光義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP23136283A priority Critical patent/JPS60123708A/ja
Priority to US06/679,358 priority patent/US4674875A/en
Publication of JPS60123708A publication Critical patent/JPS60123708A/ja
Publication of JPH0315962B2 publication Critical patent/JPH0315962B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP23136283A 1983-12-09 1983-12-09 磁気デイスクの表面欠陥検査方法および装置 Granted JPS60123708A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP23136283A JPS60123708A (ja) 1983-12-09 1983-12-09 磁気デイスクの表面欠陥検査方法および装置
US06/679,358 US4674875A (en) 1983-12-09 1984-12-07 Method and apparatus for inspecting surface defects on the magnetic disk file memories

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23136283A JPS60123708A (ja) 1983-12-09 1983-12-09 磁気デイスクの表面欠陥検査方法および装置

Publications (2)

Publication Number Publication Date
JPS60123708A true JPS60123708A (ja) 1985-07-02
JPH0315962B2 JPH0315962B2 (enrdf_load_stackoverflow) 1991-03-04

Family

ID=16922428

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23136283A Granted JPS60123708A (ja) 1983-12-09 1983-12-09 磁気デイスクの表面欠陥検査方法および装置

Country Status (1)

Country Link
JP (1) JPS60123708A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267651A (ja) * 1986-05-15 1987-11-20 Hitachi Electronics Eng Co Ltd 磁気ディスク用のサブストレート面板の表面欠陥検出装置
JPS62267650A (ja) * 1986-05-15 1987-11-20 Hitachi Electronics Eng Co Ltd 面板欠陥検出方法およびその検出器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62267651A (ja) * 1986-05-15 1987-11-20 Hitachi Electronics Eng Co Ltd 磁気ディスク用のサブストレート面板の表面欠陥検出装置
JPS62267650A (ja) * 1986-05-15 1987-11-20 Hitachi Electronics Eng Co Ltd 面板欠陥検出方法およびその検出器

Also Published As

Publication number Publication date
JPH0315962B2 (enrdf_load_stackoverflow) 1991-03-04

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