JPS60118914A - ステ−ジの速度制御装置 - Google Patents

ステ−ジの速度制御装置

Info

Publication number
JPS60118914A
JPS60118914A JP58226344A JP22634483A JPS60118914A JP S60118914 A JPS60118914 A JP S60118914A JP 58226344 A JP58226344 A JP 58226344A JP 22634483 A JP22634483 A JP 22634483A JP S60118914 A JPS60118914 A JP S60118914A
Authority
JP
Japan
Prior art keywords
stage
motor
pulse
signal
command pulse
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58226344A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0477324B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Kazuaki Saeki
和明 佐伯
Aiichi Ishikawa
愛一 石川
Noriyoshi Hashimoto
橋本　憲慶
Koichi Kudo
浩一 工藤
Kuniyuki Yoshikawa
吉川　邦行
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Nippon Kogaku KK filed Critical Nikon Corp
Priority to JP58226344A priority Critical patent/JPS60118914A/ja
Priority to US06/675,323 priority patent/US4577141A/en
Publication of JPS60118914A publication Critical patent/JPS60118914A/ja
Publication of JPH0477324B2 publication Critical patent/JPH0477324B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/25—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for continuous-path control
    • G05B19/251—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for continuous-path control the positional error is used to control continuously the servomotor according to its magnitude
    • G05B19/253—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for continuous-path control the positional error is used to control continuously the servomotor according to its magnitude with speed feedback only
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/35—Nc in input of data, input till input file format
    • G05B2219/35438—Joystick
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41156—Injection of vibration anti-stick, against static friction, dither, stiction

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • Control Of Velocity Or Acceleration (AREA)
  • Control Of Electric Motors In General (AREA)
JP58226344A 1983-11-30 1983-11-30 ステ−ジの速度制御装置 Granted JPS60118914A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58226344A JPS60118914A (ja) 1983-11-30 1983-11-30 ステ−ジの速度制御装置
US06/675,323 US4577141A (en) 1983-11-30 1984-11-27 System for driving a movable stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58226344A JPS60118914A (ja) 1983-11-30 1983-11-30 ステ−ジの速度制御装置

Publications (2)

Publication Number Publication Date
JPS60118914A true JPS60118914A (ja) 1985-06-26
JPH0477324B2 JPH0477324B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-08

Family

ID=16843694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58226344A Granted JPS60118914A (ja) 1983-11-30 1983-11-30 ステ−ジの速度制御装置

Country Status (1)

Country Link
JP (1) JPS60118914A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144112U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-03-02 1982-09-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57144112U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1981-03-02 1982-09-10

Also Published As

Publication number Publication date
JPH0477324B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-12-08

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