JPS60112691A - 分子線エピタキシャル成長装置用の基板保持装置 - Google Patents
分子線エピタキシャル成長装置用の基板保持装置Info
- Publication number
- JPS60112691A JPS60112691A JP21716883A JP21716883A JPS60112691A JP S60112691 A JPS60112691 A JP S60112691A JP 21716883 A JP21716883 A JP 21716883A JP 21716883 A JP21716883 A JP 21716883A JP S60112691 A JPS60112691 A JP S60112691A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- holding device
- molecular beam
- epitaxial growth
- heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B23/00—Single-crystal growth by condensing evaporated or sublimed materials
- C30B23/02—Epitaxial-layer growth
- C30B23/06—Heating of the deposition chamber, the substrate or the materials to be evaporated
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21716883A JPS60112691A (ja) | 1983-11-18 | 1983-11-18 | 分子線エピタキシャル成長装置用の基板保持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21716883A JPS60112691A (ja) | 1983-11-18 | 1983-11-18 | 分子線エピタキシャル成長装置用の基板保持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60112691A true JPS60112691A (ja) | 1985-06-19 |
JPS636520B2 JPS636520B2 (enrdf_load_stackoverflow) | 1988-02-10 |
Family
ID=16699920
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21716883A Granted JPS60112691A (ja) | 1983-11-18 | 1983-11-18 | 分子線エピタキシャル成長装置用の基板保持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60112691A (enrdf_load_stackoverflow) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61195042U (enrdf_load_stackoverflow) * | 1985-05-25 | 1986-12-04 | ||
JPS6244433U (enrdf_load_stackoverflow) * | 1985-09-06 | 1987-03-17 | ||
US4777022A (en) * | 1984-08-28 | 1988-10-11 | Stephen I. Boldish | Epitaxial heater apparatus and process |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4311051B2 (ja) * | 2003-03-19 | 2009-08-12 | 東レ株式会社 | 中空糸膜モジュールの製造方法およびそれに用いる中空糸膜モジュールの製造装置 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730320A (en) * | 1980-07-29 | 1982-02-18 | Fujitsu Ltd | Substrate holder for molecular beam epitaxy |
-
1983
- 1983-11-18 JP JP21716883A patent/JPS60112691A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5730320A (en) * | 1980-07-29 | 1982-02-18 | Fujitsu Ltd | Substrate holder for molecular beam epitaxy |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4777022A (en) * | 1984-08-28 | 1988-10-11 | Stephen I. Boldish | Epitaxial heater apparatus and process |
JPS61195042U (enrdf_load_stackoverflow) * | 1985-05-25 | 1986-12-04 | ||
JPS6244433U (enrdf_load_stackoverflow) * | 1985-09-06 | 1987-03-17 |
Also Published As
Publication number | Publication date |
---|---|
JPS636520B2 (enrdf_load_stackoverflow) | 1988-02-10 |
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