JPS60110119A - 位置合わせ方法 - Google Patents

位置合わせ方法

Info

Publication number
JPS60110119A
JPS60110119A JP58217790A JP21779083A JPS60110119A JP S60110119 A JPS60110119 A JP S60110119A JP 58217790 A JP58217790 A JP 58217790A JP 21779083 A JP21779083 A JP 21779083A JP S60110119 A JPS60110119 A JP S60110119A
Authority
JP
Japan
Prior art keywords
marks
substrates
mark
position matching
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58217790A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259615B2 (enrdf_load_stackoverflow
Inventor
Arinori Chokai
鳥海　有紀
Kazunori Suzuki
一憲 鈴木
Hiroo Katsuta
勝田　裕夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP58217790A priority Critical patent/JPS60110119A/ja
Priority to US06/672,784 priority patent/US4643579A/en
Publication of JPS60110119A publication Critical patent/JPS60110119A/ja
Publication of JPH0259615B2 publication Critical patent/JPH0259615B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7073—Alignment marks and their environment
    • G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
    • G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
    • G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/133354—Arrangements for aligning or assembling substrates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP58217790A 1983-11-21 1983-11-21 位置合わせ方法 Granted JPS60110119A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP58217790A JPS60110119A (ja) 1983-11-21 1983-11-21 位置合わせ方法
US06/672,784 US4643579A (en) 1983-11-21 1984-11-19 Aligning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58217790A JPS60110119A (ja) 1983-11-21 1983-11-21 位置合わせ方法

Publications (2)

Publication Number Publication Date
JPS60110119A true JPS60110119A (ja) 1985-06-15
JPH0259615B2 JPH0259615B2 (enrdf_load_stackoverflow) 1990-12-13

Family

ID=16709762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58217790A Granted JPS60110119A (ja) 1983-11-21 1983-11-21 位置合わせ方法

Country Status (1)

Country Link
JP (1) JPS60110119A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336034U (enrdf_load_stackoverflow) * 1986-08-26 1988-03-08
JPH06102675A (ja) * 1992-09-17 1994-04-15 Kamo Denki Kenkyusho:Kk 印刷機用版材の高速高精度自動穴あけ機構
US7967063B2 (en) 2007-07-10 2011-06-28 Denso Corporation Air conditioning apparatus for vehicle
JP2016082061A (ja) * 2014-10-16 2016-05-16 トヨタ自動車株式会社 ウエハとマスクの位置合わせ方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336034U (enrdf_load_stackoverflow) * 1986-08-26 1988-03-08
JPH06102675A (ja) * 1992-09-17 1994-04-15 Kamo Denki Kenkyusho:Kk 印刷機用版材の高速高精度自動穴あけ機構
US7967063B2 (en) 2007-07-10 2011-06-28 Denso Corporation Air conditioning apparatus for vehicle
JP2016082061A (ja) * 2014-10-16 2016-05-16 トヨタ自動車株式会社 ウエハとマスクの位置合わせ方法

Also Published As

Publication number Publication date
JPH0259615B2 (enrdf_load_stackoverflow) 1990-12-13

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