JPS6336034U - - Google Patents

Info

Publication number
JPS6336034U
JPS6336034U JP1986129917U JP12991786U JPS6336034U JP S6336034 U JPS6336034 U JP S6336034U JP 1986129917 U JP1986129917 U JP 1986129917U JP 12991786 U JP12991786 U JP 12991786U JP S6336034 U JPS6336034 U JP S6336034U
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JP
Japan
Prior art keywords
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alignment mark
light
substrate
alignment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1986129917U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0241862Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986129917U priority Critical patent/JPH0241862Y2/ja
Publication of JPS6336034U publication Critical patent/JPS6336034U/ja
Application granted granted Critical
Publication of JPH0241862Y2 publication Critical patent/JPH0241862Y2/ja
Expired legal-status Critical Current

Links

JP1986129917U 1986-08-26 1986-08-26 Expired JPH0241862Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986129917U JPH0241862Y2 (enrdf_load_stackoverflow) 1986-08-26 1986-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986129917U JPH0241862Y2 (enrdf_load_stackoverflow) 1986-08-26 1986-08-26

Publications (2)

Publication Number Publication Date
JPS6336034U true JPS6336034U (enrdf_load_stackoverflow) 1988-03-08
JPH0241862Y2 JPH0241862Y2 (enrdf_load_stackoverflow) 1990-11-08

Family

ID=31026924

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986129917U Expired JPH0241862Y2 (enrdf_load_stackoverflow) 1986-08-26 1986-08-26

Country Status (1)

Country Link
JP (1) JPH0241862Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147253A (ja) * 2008-12-18 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> 位置合わせ方法、ホトマスクおよびウエハ
JP2012242576A (ja) * 2011-05-19 2012-12-10 V Technology Co Ltd フォトマスク及び露光装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011668A (enrdf_load_stackoverflow) * 1973-06-01 1975-02-06
JPS52144973A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Positioning method of semiconductor wafers
JPS53109080A (en) * 1977-03-03 1978-09-22 Fujitsu Ltd Positioning device
JPS60110119A (ja) * 1983-11-21 1985-06-15 Canon Inc 位置合わせ方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5011668A (enrdf_load_stackoverflow) * 1973-06-01 1975-02-06
JPS52144973A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Positioning method of semiconductor wafers
JPS53109080A (en) * 1977-03-03 1978-09-22 Fujitsu Ltd Positioning device
JPS60110119A (ja) * 1983-11-21 1985-06-15 Canon Inc 位置合わせ方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010147253A (ja) * 2008-12-18 2010-07-01 Nippon Telegr & Teleph Corp <Ntt> 位置合わせ方法、ホトマスクおよびウエハ
JP2012242576A (ja) * 2011-05-19 2012-12-10 V Technology Co Ltd フォトマスク及び露光装置

Also Published As

Publication number Publication date
JPH0241862Y2 (enrdf_load_stackoverflow) 1990-11-08

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