JPS53109080A - Positioning device - Google Patents

Positioning device

Info

Publication number
JPS53109080A
JPS53109080A JP2292477A JP2292477A JPS53109080A JP S53109080 A JPS53109080 A JP S53109080A JP 2292477 A JP2292477 A JP 2292477A JP 2292477 A JP2292477 A JP 2292477A JP S53109080 A JPS53109080 A JP S53109080A
Authority
JP
Japan
Prior art keywords
positioning device
rising
down element
locate
locating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2292477A
Other languages
Japanese (ja)
Other versions
JPS5854408B2 (en
Inventor
Akifumi Muto
Hideo Suzuki
Mamoru Yoneda
Tadao Saito
Sunao Ishihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP52022924A priority Critical patent/JPS5854408B2/en
Publication of JPS53109080A publication Critical patent/JPS53109080A/en
Publication of JPS5854408B2 publication Critical patent/JPS5854408B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE: To enable to position accurately by locating the center of the rising element and down element indicating above the rated value in removing as noise when the width between the rising element and down element of the detecting signal, which indicates the position shear of the objects to locate the position, indicate below the specified value.
COPYRIGHT: (C)1978,JPO&Japio
JP52022924A 1977-03-03 1977-03-03 Alignment method Expired JPS5854408B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP52022924A JPS5854408B2 (en) 1977-03-03 1977-03-03 Alignment method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP52022924A JPS5854408B2 (en) 1977-03-03 1977-03-03 Alignment method

Publications (2)

Publication Number Publication Date
JPS53109080A true JPS53109080A (en) 1978-09-22
JPS5854408B2 JPS5854408B2 (en) 1983-12-05

Family

ID=12096177

Family Applications (1)

Application Number Title Priority Date Filing Date
JP52022924A Expired JPS5854408B2 (en) 1977-03-03 1977-03-03 Alignment method

Country Status (1)

Country Link
JP (1) JPS5854408B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336034U (en) * 1986-08-26 1988-03-08
JPH02290040A (en) * 1989-04-28 1990-11-29 Disco Abrasive Syst Ltd Alignment system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0444544Y2 (en) * 1987-11-09 1992-10-20

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354675A (en) * 1976-10-28 1978-05-18 Nippon Telegr & Teleph Corp <Ntt> Positioning detecting method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5354675A (en) * 1976-10-28 1978-05-18 Nippon Telegr & Teleph Corp <Ntt> Positioning detecting method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6336034U (en) * 1986-08-26 1988-03-08
JPH0241862Y2 (en) * 1986-08-26 1990-11-08
JPH02290040A (en) * 1989-04-28 1990-11-29 Disco Abrasive Syst Ltd Alignment system

Also Published As

Publication number Publication date
JPS5854408B2 (en) 1983-12-05

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