JPS60108306A - 窒化チタンを含む窒化ホウ素とその製造方法 - Google Patents

窒化チタンを含む窒化ホウ素とその製造方法

Info

Publication number
JPS60108306A
JPS60108306A JP58211036A JP21103683A JPS60108306A JP S60108306 A JPS60108306 A JP S60108306A JP 58211036 A JP58211036 A JP 58211036A JP 21103683 A JP21103683 A JP 21103683A JP S60108306 A JPS60108306 A JP S60108306A
Authority
JP
Japan
Prior art keywords
boron nitride
nitride
source gas
boron
deposition source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58211036A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0448722B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Nakae
中江　博之
Toshiaki Matsuda
松田　敏紹
Naoki Uno
直樹 宇野
Yukio Matsunami
松波　幸男
Toshio Hirai
平井　敏雄
Takeshi Masumoto
健 増本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Japan Science and Technology Agency
Shingijutsu Kaihatsu Jigyodan
Original Assignee
Research Development Corp of Japan
Shingijutsu Kaihatsu Jigyodan
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Research Development Corp of Japan, Shingijutsu Kaihatsu Jigyodan filed Critical Research Development Corp of Japan
Priority to JP58211036A priority Critical patent/JPS60108306A/ja
Priority to DE8484113503T priority patent/DE3463641D1/de
Priority to EP84113503A priority patent/EP0149044B1/en
Priority to US06/670,154 priority patent/US4565747A/en
Publication of JPS60108306A publication Critical patent/JPS60108306A/ja
Publication of JPH0448722B2 publication Critical patent/JPH0448722B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ceramic Products (AREA)
  • Chemical Vapour Deposition (AREA)
JP58211036A 1983-11-11 1983-11-11 窒化チタンを含む窒化ホウ素とその製造方法 Granted JPS60108306A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP58211036A JPS60108306A (ja) 1983-11-11 1983-11-11 窒化チタンを含む窒化ホウ素とその製造方法
DE8484113503T DE3463641D1 (en) 1983-11-11 1984-11-08 Boron nitride containing titanium nitride, method of producing the same and composite ceramics produced therefrom
EP84113503A EP0149044B1 (en) 1983-11-11 1984-11-08 Boron nitride containing titanium nitride, method of producing the same and composite ceramics produced therefrom
US06/670,154 US4565747A (en) 1983-11-11 1984-11-09 Boron nitride containing titanium nitride, method of producing the same and composite ceramics produced therefrom

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58211036A JPS60108306A (ja) 1983-11-11 1983-11-11 窒化チタンを含む窒化ホウ素とその製造方法

Publications (2)

Publication Number Publication Date
JPS60108306A true JPS60108306A (ja) 1985-06-13
JPH0448722B2 JPH0448722B2 (enrdf_load_stackoverflow) 1992-08-07

Family

ID=16599301

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58211036A Granted JPS60108306A (ja) 1983-11-11 1983-11-11 窒化チタンを含む窒化ホウ素とその製造方法

Country Status (1)

Country Link
JP (1) JPS60108306A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310562A (ja) * 1989-06-08 1991-01-18 Fuji Xerox Co Ltd 信号補正装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0310562A (ja) * 1989-06-08 1991-01-18 Fuji Xerox Co Ltd 信号補正装置

Also Published As

Publication number Publication date
JPH0448722B2 (enrdf_load_stackoverflow) 1992-08-07

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