JPS6242996B2 - - Google Patents

Info

Publication number
JPS6242996B2
JPS6242996B2 JP53016134A JP1613478A JPS6242996B2 JP S6242996 B2 JPS6242996 B2 JP S6242996B2 JP 53016134 A JP53016134 A JP 53016134A JP 1613478 A JP1613478 A JP 1613478A JP S6242996 B2 JPS6242996 B2 JP S6242996B2
Authority
JP
Japan
Prior art keywords
hafnium
film
producing
iodine
compound film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53016134A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54109098A (en
Inventor
Moriaki Fuyama
Mitsuru Ura
Haruhiko Pponda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP1613478A priority Critical patent/JPS54109098A/ja
Publication of JPS54109098A publication Critical patent/JPS54109098A/ja
Publication of JPS6242996B2 publication Critical patent/JPS6242996B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1613478A 1978-02-15 1978-02-15 Method of manufacturing hafnium compound Granted JPS54109098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1613478A JPS54109098A (en) 1978-02-15 1978-02-15 Method of manufacturing hafnium compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1613478A JPS54109098A (en) 1978-02-15 1978-02-15 Method of manufacturing hafnium compound

Publications (2)

Publication Number Publication Date
JPS54109098A JPS54109098A (en) 1979-08-27
JPS6242996B2 true JPS6242996B2 (enrdf_load_stackoverflow) 1987-09-10

Family

ID=11908012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1613478A Granted JPS54109098A (en) 1978-02-15 1978-02-15 Method of manufacturing hafnium compound

Country Status (1)

Country Link
JP (1) JPS54109098A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09150398A (ja) * 1995-11-27 1997-06-10 Tohoku Shoji Kk カッター

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1224091A (en) * 1983-02-25 1987-07-14 Liburdi Engineering Limited Chemical vapor deposition of metal compound coatings utilizing metal sub-halide
JPS62218576A (ja) * 1986-03-19 1987-09-25 Kiichiro Kamata プラズマｃｖｄ法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA1087041A (en) * 1975-09-15 1980-10-07 Mohammad J. Hakim Hafnium carbide and nitride coatings

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09150398A (ja) * 1995-11-27 1997-06-10 Tohoku Shoji Kk カッター

Also Published As

Publication number Publication date
JPS54109098A (en) 1979-08-27

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