JPS54109098A - Method of manufacturing hafnium compound - Google Patents

Method of manufacturing hafnium compound

Info

Publication number
JPS54109098A
JPS54109098A JP1613478A JP1613478A JPS54109098A JP S54109098 A JPS54109098 A JP S54109098A JP 1613478 A JP1613478 A JP 1613478A JP 1613478 A JP1613478 A JP 1613478A JP S54109098 A JPS54109098 A JP S54109098A
Authority
JP
Japan
Prior art keywords
manufacturing
hafnium compound
hafnium
compound
manufacturing hafnium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1613478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6242996B2 (enrdf_load_stackoverflow
Inventor
Moriaki Fuyama
Mitsuru Ura
Haruhiko Honda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Proterial Ltd
Original Assignee
Hitachi Metals Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Metals Ltd filed Critical Hitachi Metals Ltd
Priority to JP1613478A priority Critical patent/JPS54109098A/ja
Publication of JPS54109098A publication Critical patent/JPS54109098A/ja
Publication of JPS6242996B2 publication Critical patent/JPS6242996B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
JP1613478A 1978-02-15 1978-02-15 Method of manufacturing hafnium compound Granted JPS54109098A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1613478A JPS54109098A (en) 1978-02-15 1978-02-15 Method of manufacturing hafnium compound

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1613478A JPS54109098A (en) 1978-02-15 1978-02-15 Method of manufacturing hafnium compound

Publications (2)

Publication Number Publication Date
JPS54109098A true JPS54109098A (en) 1979-08-27
JPS6242996B2 JPS6242996B2 (enrdf_load_stackoverflow) 1987-09-10

Family

ID=11908012

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1613478A Granted JPS54109098A (en) 1978-02-15 1978-02-15 Method of manufacturing hafnium compound

Country Status (1)

Country Link
JP (1) JPS54109098A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149777A (ja) * 1983-02-25 1985-08-07 リバ−デイ　エンジニアリング　リミテツド 金属化合物被覆形成法
JPS62218576A (ja) * 1986-03-19 1987-09-25 Kiichiro Kamata プラズマｃｖｄ法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09150398A (ja) * 1995-11-27 1997-06-10 Tohoku Shoji Kk カッター

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236585A (en) * 1975-09-15 1977-03-19 Westinghouse Canada Ltd Process for preparing coating of hafnium compound

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5236585A (en) * 1975-09-15 1977-03-19 Westinghouse Canada Ltd Process for preparing coating of hafnium compound

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60149777A (ja) * 1983-02-25 1985-08-07 リバ−デイ　エンジニアリング　リミテツド 金属化合物被覆形成法
JPS62218576A (ja) * 1986-03-19 1987-09-25 Kiichiro Kamata プラズマｃｖｄ法

Also Published As

Publication number Publication date
JPS6242996B2 (enrdf_load_stackoverflow) 1987-09-10

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