JPS54127688A - Method of fabricating semiconductor - Google Patents

Method of fabricating semiconductor

Info

Publication number
JPS54127688A
JPS54127688A JP3497978A JP3497978A JPS54127688A JP S54127688 A JPS54127688 A JP S54127688A JP 3497978 A JP3497978 A JP 3497978A JP 3497978 A JP3497978 A JP 3497978A JP S54127688 A JPS54127688 A JP S54127688A
Authority
JP
Japan
Prior art keywords
fabricating semiconductor
fabricating
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3497978A
Other languages
Japanese (ja)
Inventor
Kunikazu Oota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP3497978A priority Critical patent/JPS54127688A/en
Publication of JPS54127688A publication Critical patent/JPS54127688A/en
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
  • Semiconductor Memories (AREA)
JP3497978A 1978-03-28 1978-03-28 Method of fabricating semiconductor Pending JPS54127688A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3497978A JPS54127688A (en) 1978-03-28 1978-03-28 Method of fabricating semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3497978A JPS54127688A (en) 1978-03-28 1978-03-28 Method of fabricating semiconductor

Publications (1)

Publication Number Publication Date
JPS54127688A true JPS54127688A (en) 1979-10-03

Family

ID=12429255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3497978A Pending JPS54127688A (en) 1978-03-28 1978-03-28 Method of fabricating semiconductor

Country Status (1)

Country Link
JP (1) JPS54127688A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643751A (en) * 1979-09-17 1981-04-22 Fujitsu Ltd Manufacture of semiconductor device
JPS5660033A (en) * 1979-10-22 1981-05-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS56115561A (en) * 1979-12-10 1981-09-10 Texas Instruments Inc Double level polysilicon serial transistor device
JPS56146246A (en) * 1980-04-14 1981-11-13 Toshiba Corp Manufacture of semiconductor integrated circuit
JPS57113275A (en) * 1980-12-29 1982-07-14 Fujitsu Ltd Manufacture of semiconductor device
JPS57211251A (en) * 1981-06-23 1982-12-25 Toshiba Corp Manufacture of semiconductor integrated circuit

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5643751A (en) * 1979-09-17 1981-04-22 Fujitsu Ltd Manufacture of semiconductor device
JPS5660033A (en) * 1979-10-22 1981-05-23 Chiyou Lsi Gijutsu Kenkyu Kumiai Manufacture of semiconductor device
JPS56115561A (en) * 1979-12-10 1981-09-10 Texas Instruments Inc Double level polysilicon serial transistor device
JPS56146246A (en) * 1980-04-14 1981-11-13 Toshiba Corp Manufacture of semiconductor integrated circuit
JPS57113275A (en) * 1980-12-29 1982-07-14 Fujitsu Ltd Manufacture of semiconductor device
JPS57211251A (en) * 1981-06-23 1982-12-25 Toshiba Corp Manufacture of semiconductor integrated circuit
JPS639748B2 (en) * 1981-06-23 1988-03-01 Tokyo Shibaura Electric Co

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