JPH0425347B2 - - Google Patents

Info

Publication number
JPH0425347B2
JPH0425347B2 JP61140385A JP14038586A JPH0425347B2 JP H0425347 B2 JPH0425347 B2 JP H0425347B2 JP 61140385 A JP61140385 A JP 61140385A JP 14038586 A JP14038586 A JP 14038586A JP H0425347 B2 JPH0425347 B2 JP H0425347B2
Authority
JP
Japan
Prior art keywords
silicon carbide
reaction
film
gas
carbon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61140385A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62297467A (ja
Inventor
Mamoru Maeda
Juji Furumura
Tadashi Murata
Masaki Okada
Akira Nogami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyo Tanso Co Ltd
Fujitsu Ltd
Original Assignee
Toyo Tanso Co Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyo Tanso Co Ltd, Fujitsu Ltd filed Critical Toyo Tanso Co Ltd
Priority to JP61140385A priority Critical patent/JPS62297467A/ja
Publication of JPS62297467A publication Critical patent/JPS62297467A/ja
Publication of JPH0425347B2 publication Critical patent/JPH0425347B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP61140385A 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法 Granted JPS62297467A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61140385A JPS62297467A (ja) 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61140385A JPS62297467A (ja) 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法

Publications (2)

Publication Number Publication Date
JPS62297467A JPS62297467A (ja) 1987-12-24
JPH0425347B2 true JPH0425347B2 (enrdf_load_stackoverflow) 1992-04-30

Family

ID=15267581

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61140385A Granted JPS62297467A (ja) 1986-06-18 1986-06-18 炭化ケイ素被膜形成方法

Country Status (1)

Country Link
JP (1) JPS62297467A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01249679A (ja) * 1988-03-29 1989-10-04 Toyo Tanso Kk 黒鉛一炭化珪素複合体並びにその製造法
GB8910182D0 (en) * 1989-05-04 1989-06-21 British Petroleum Co Plc Process for depositing a silicon carbide coating on a filament

Also Published As

Publication number Publication date
JPS62297467A (ja) 1987-12-24

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