JPH0463012B2 - - Google Patents
Info
- Publication number
- JPH0463012B2 JPH0463012B2 JP59190647A JP19064784A JPH0463012B2 JP H0463012 B2 JPH0463012 B2 JP H0463012B2 JP 59190647 A JP59190647 A JP 59190647A JP 19064784 A JP19064784 A JP 19064784A JP H0463012 B2 JPH0463012 B2 JP H0463012B2
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- boron
- nitrogen
- hard material
- weight
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 102
- 239000010936 titanium Substances 0.000 claims description 80
- 229910052719 titanium Inorganic materials 0.000 claims description 73
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 72
- 229910052796 boron Inorganic materials 0.000 claims description 53
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 52
- 239000000463 material Substances 0.000 claims description 52
- 229910052757 nitrogen Inorganic materials 0.000 claims description 52
- 239000007789 gas Substances 0.000 description 36
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 27
- 239000000758 substrate Substances 0.000 description 22
- 238000000151 deposition Methods 0.000 description 20
- 230000008021 deposition Effects 0.000 description 20
- 239000000203 mixture Substances 0.000 description 17
- 238000001556 precipitation Methods 0.000 description 15
- 238000002441 X-ray diffraction Methods 0.000 description 10
- -1 TiCl 4 Chemical class 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 238000000576 coating method Methods 0.000 description 6
- 239000002994 raw material Substances 0.000 description 6
- QYEXBYZXHDUPRC-UHFFFAOYSA-N B#[Ti]#B Chemical compound B#[Ti]#B QYEXBYZXHDUPRC-UHFFFAOYSA-N 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- 229910052582 BN Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000008187 granular material Substances 0.000 description 4
- 229910002804 graphite Inorganic materials 0.000 description 4
- 239000010439 graphite Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000001947 vapour-phase growth Methods 0.000 description 3
- 229910017855 NH 4 F Inorganic materials 0.000 description 2
- BGECDVWSWDRFSP-UHFFFAOYSA-N borazine Chemical compound B1NBNBN1 BGECDVWSWDRFSP-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 150000004820 halides Chemical class 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012916 structural analysis Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical class N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- QDMRQDKMCNPQQH-UHFFFAOYSA-N boranylidynetitanium Chemical compound [B].[Ti] QDMRQDKMCNPQQH-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000012808 vapor phase Substances 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59190647A JPS6168323A (ja) | 1984-09-13 | 1984-09-13 | チタン、ホウ素、窒素からなる硬質材料 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59190647A JPS6168323A (ja) | 1984-09-13 | 1984-09-13 | チタン、ホウ素、窒素からなる硬質材料 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168323A JPS6168323A (ja) | 1986-04-08 |
| JPH0463012B2 true JPH0463012B2 (enrdf_load_stackoverflow) | 1992-10-08 |
Family
ID=16261555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59190647A Granted JPS6168323A (ja) | 1984-09-13 | 1984-09-13 | チタン、ホウ素、窒素からなる硬質材料 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6168323A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5409762A (en) * | 1989-05-10 | 1995-04-25 | The Furukawa Electric Company, Ltd. | Electric contact materials, production methods thereof and electric contacts used these |
| US5597064A (en) * | 1989-05-10 | 1997-01-28 | The Furukawa Electric Co., Ltd. | Electric contact materials, production methods thereof and electric contacts used these |
-
1984
- 1984-09-13 JP JP59190647A patent/JPS6168323A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6168323A (ja) | 1986-04-08 |
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