JPS60107890A - 基板洗浄装置 - Google Patents

基板洗浄装置

Info

Publication number
JPS60107890A
JPS60107890A JP58216536A JP21653683A JPS60107890A JP S60107890 A JPS60107890 A JP S60107890A JP 58216536 A JP58216536 A JP 58216536A JP 21653683 A JP21653683 A JP 21653683A JP S60107890 A JPS60107890 A JP S60107890A
Authority
JP
Japan
Prior art keywords
cleaning
substrate
conveyor
section
substrate cleaning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58216536A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0467358B2 (enExample
Inventor
耕司 黒田
幸二 藤原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP58216536A priority Critical patent/JPS60107890A/ja
Publication of JPS60107890A publication Critical patent/JPS60107890A/ja
Publication of JPH0467358B2 publication Critical patent/JPH0467358B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
  • Manufacturing Of Printed Wiring (AREA)
JP58216536A 1983-11-17 1983-11-17 基板洗浄装置 Granted JPS60107890A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58216536A JPS60107890A (ja) 1983-11-17 1983-11-17 基板洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216536A JPS60107890A (ja) 1983-11-17 1983-11-17 基板洗浄装置

Publications (2)

Publication Number Publication Date
JPS60107890A true JPS60107890A (ja) 1985-06-13
JPH0467358B2 JPH0467358B2 (enExample) 1992-10-28

Family

ID=16689971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58216536A Granted JPS60107890A (ja) 1983-11-17 1983-11-17 基板洗浄装置

Country Status (1)

Country Link
JP (1) JPS60107890A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01258488A (ja) * 1988-04-08 1989-10-16 Elna Co Ltd プリント配線板の製造装置
JPH03186371A (ja) * 1989-11-07 1991-08-14 Boellhoff Verfahrenstechnik Gmbh & Co Kg プリント基板被覆装置と方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01258488A (ja) * 1988-04-08 1989-10-16 Elna Co Ltd プリント配線板の製造装置
JPH03186371A (ja) * 1989-11-07 1991-08-14 Boellhoff Verfahrenstechnik Gmbh & Co Kg プリント基板被覆装置と方法

Also Published As

Publication number Publication date
JPH0467358B2 (enExample) 1992-10-28

Similar Documents

Publication Publication Date Title
US5626159A (en) Apparatus for cleaning semiconductor wafers
JPS60107890A (ja) 基板洗浄装置
JPH0193197A (ja) 基板洗浄機構
KR100471936B1 (ko) 웨이퍼의세정·박리방법및장치
JPH0467357B2 (enExample)
JP2002239485A (ja) 基板の洗浄装置及び洗浄方法
JPH04107824A (ja) 洗浄用部材の洗浄方法
US4692222A (en) Electroplating method and apparatus for electroplating high aspect ratio thru-holes
US11975922B2 (en) Hold down tray conveyor
JPH01172120A (ja) ウエハ搬送機
JP2002319616A (ja) ウエハキャリアおよびそれを用いた太陽電池ウエハのはんだ付け処理方法
US11872600B2 (en) Laned belt for cleaner
KR900006068B1 (ko) 전자부품 세정 건조장치
JP3189949B2 (ja) 電解母板研磨装置及びそれを組み込んだ種板自動剥取システム
JP2001162233A (ja) 洗浄方法、洗浄乾燥方法およびワーク搬送装置
JPH03255629A (ja) 半導体ウェハーの洗浄方法
JP7199788B2 (ja) 食器の浸漬方法および洗浄方法、並びに食器の浸漬装置、食器洗浄システム
JPH0237492Y2 (enExample)
JPS61105892A (ja) 基板洗浄装置
JPS643577Y2 (enExample)
JPH024791Y2 (enExample)
JPS62207570A (ja) 被はんだ付け物の洗浄装置
JPH064609Y2 (ja) 実装基板の端面洗浄装置
JP2908157B2 (ja) 回路基板のエッチング方法およびエッチング装置
JPS60168580A (ja) 基板洗浄装置