JPS60103352A - フオトレジスト形成用積層板製造装置 - Google Patents

フオトレジスト形成用積層板製造装置

Info

Publication number
JPS60103352A
JPS60103352A JP58211955A JP21195583A JPS60103352A JP S60103352 A JPS60103352 A JP S60103352A JP 58211955 A JP58211955 A JP 58211955A JP 21195583 A JP21195583 A JP 21195583A JP S60103352 A JPS60103352 A JP S60103352A
Authority
JP
Japan
Prior art keywords
circuit board
liquid
layer
photosensitive
printed circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58211955A
Other languages
English (en)
Japanese (ja)
Other versions
JPH045183B2 (enrdf_load_stackoverflow
Inventor
Toshimi Aoyama
青山 俊身
Hiroyuki Toda
任田 博行
Kazuo Kato
和夫 加藤
Hisashi Nakane
中根 久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP58211955A priority Critical patent/JPS60103352A/ja
Publication of JPS60103352A publication Critical patent/JPS60103352A/ja
Publication of JPH045183B2 publication Critical patent/JPH045183B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16Coating processes; Apparatus therefor
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0091Apparatus for coating printed circuits using liquid non-metallic coating compositions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Laminated Bodies (AREA)
JP58211955A 1983-11-11 1983-11-11 フオトレジスト形成用積層板製造装置 Granted JPS60103352A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58211955A JPS60103352A (ja) 1983-11-11 1983-11-11 フオトレジスト形成用積層板製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58211955A JPS60103352A (ja) 1983-11-11 1983-11-11 フオトレジスト形成用積層板製造装置

Publications (2)

Publication Number Publication Date
JPS60103352A true JPS60103352A (ja) 1985-06-07
JPH045183B2 JPH045183B2 (enrdf_load_stackoverflow) 1992-01-30

Family

ID=16614462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58211955A Granted JPS60103352A (ja) 1983-11-11 1983-11-11 フオトレジスト形成用積層板製造装置

Country Status (1)

Country Link
JP (1) JPS60103352A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621780U (enrdf_load_stackoverflow) * 1985-06-19 1987-01-08

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128701A (en) * 1976-04-21 1977-10-28 Kuraray Co Method of producing typographic photoopolymer
JPS52154363A (en) * 1976-06-18 1977-12-22 Tokyo Ouka Kougiyou Kk Method of forming photoresist
JPS55121446A (en) * 1979-03-12 1980-09-18 Uk Porigurafuichiesukii I Im I Adhesive* halation preventive composition for producing photoopolymerized print plate with metal back
JPS57197891A (en) * 1981-05-29 1982-12-04 Asahi Chemical Ind Method and device for thermally press-bonding photosensitive dry film resist for producing printed circuit board

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52128701A (en) * 1976-04-21 1977-10-28 Kuraray Co Method of producing typographic photoopolymer
JPS52154363A (en) * 1976-06-18 1977-12-22 Tokyo Ouka Kougiyou Kk Method of forming photoresist
JPS55121446A (en) * 1979-03-12 1980-09-18 Uk Porigurafuichiesukii I Im I Adhesive* halation preventive composition for producing photoopolymerized print plate with metal back
JPS57197891A (en) * 1981-05-29 1982-12-04 Asahi Chemical Ind Method and device for thermally press-bonding photosensitive dry film resist for producing printed circuit board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621780U (enrdf_load_stackoverflow) * 1985-06-19 1987-01-08

Also Published As

Publication number Publication date
JPH045183B2 (enrdf_load_stackoverflow) 1992-01-30

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