JPS5993140U - ウエ−ハ移し替え装置 - Google Patents

ウエ−ハ移し替え装置

Info

Publication number
JPS5993140U
JPS5993140U JP19055282U JP19055282U JPS5993140U JP S5993140 U JPS5993140 U JP S5993140U JP 19055282 U JP19055282 U JP 19055282U JP 19055282 U JP19055282 U JP 19055282U JP S5993140 U JPS5993140 U JP S5993140U
Authority
JP
Japan
Prior art keywords
transfer
cassette
wafer
moving
wafers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19055282U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141237Y2 (enrdf_load_stackoverflow
Inventor
角田　良二
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Denki Electric Inc
Original Assignee
Hitachi Kokusai Electric Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kokusai Electric Inc filed Critical Hitachi Kokusai Electric Inc
Priority to JP19055282U priority Critical patent/JPS5993140U/ja
Publication of JPS5993140U publication Critical patent/JPS5993140U/ja
Application granted granted Critical
Publication of JPS6141237Y2 publication Critical patent/JPS6141237Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation, Sorting, Adjustment, Or Bending Of Sheets To Be Conveyed (AREA)
  • Discharge By Other Means (AREA)
JP19055282U 1982-12-15 1982-12-15 ウエ−ハ移し替え装置 Granted JPS5993140U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19055282U JPS5993140U (ja) 1982-12-15 1982-12-15 ウエ−ハ移し替え装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19055282U JPS5993140U (ja) 1982-12-15 1982-12-15 ウエ−ハ移し替え装置

Publications (2)

Publication Number Publication Date
JPS5993140U true JPS5993140U (ja) 1984-06-25
JPS6141237Y2 JPS6141237Y2 (enrdf_load_stackoverflow) 1986-11-25

Family

ID=30410551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19055282U Granted JPS5993140U (ja) 1982-12-15 1982-12-15 ウエ−ハ移し替え装置

Country Status (1)

Country Link
JP (1) JPS5993140U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151340U (enrdf_load_stackoverflow) * 1985-02-07 1986-09-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61151340U (enrdf_load_stackoverflow) * 1985-02-07 1986-09-18

Also Published As

Publication number Publication date
JPS6141237Y2 (enrdf_load_stackoverflow) 1986-11-25

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