JPS61151340U - - Google Patents

Info

Publication number
JPS61151340U
JPS61151340U JP1633885U JP1633885U JPS61151340U JP S61151340 U JPS61151340 U JP S61151340U JP 1633885 U JP1633885 U JP 1633885U JP 1633885 U JP1633885 U JP 1633885U JP S61151340 U JPS61151340 U JP S61151340U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
detector
utility
inspection device
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1633885U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530362Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985016338U priority Critical patent/JPH0530362Y2/ja
Publication of JPS61151340U publication Critical patent/JPS61151340U/ja
Application granted granted Critical
Publication of JPH0530362Y2 publication Critical patent/JPH0530362Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles To Conveyors (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1985016338U 1985-02-07 1985-02-07 Expired - Lifetime JPH0530362Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985016338U JPH0530362Y2 (enrdf_load_stackoverflow) 1985-02-07 1985-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985016338U JPH0530362Y2 (enrdf_load_stackoverflow) 1985-02-07 1985-02-07

Publications (2)

Publication Number Publication Date
JPS61151340U true JPS61151340U (enrdf_load_stackoverflow) 1986-09-18
JPH0530362Y2 JPH0530362Y2 (enrdf_load_stackoverflow) 1993-08-03

Family

ID=30503017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985016338U Expired - Lifetime JPH0530362Y2 (enrdf_load_stackoverflow) 1985-02-07 1985-02-07

Country Status (1)

Country Link
JP (1) JPH0530362Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001237306A (ja) * 2000-02-25 2001-08-31 Nikon Corp 基板ハンド、搬送装置、検査装置および平面基板収納装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993140U (ja) * 1982-12-15 1984-06-25 株式会社日立国際電気 ウエ−ハ移し替え装置
JPS59195051U (ja) * 1983-06-14 1984-12-25 日本ケ−ブル株式会社 握索機の不良握索検出器
JPS59195741U (ja) * 1983-06-13 1984-12-26 日本電気株式会社 ウエ−ハ移し替え装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993140U (ja) * 1982-12-15 1984-06-25 株式会社日立国際電気 ウエ−ハ移し替え装置
JPS59195741U (ja) * 1983-06-13 1984-12-26 日本電気株式会社 ウエ−ハ移し替え装置
JPS59195051U (ja) * 1983-06-14 1984-12-25 日本ケ−ブル株式会社 握索機の不良握索検出器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001237306A (ja) * 2000-02-25 2001-08-31 Nikon Corp 基板ハンド、搬送装置、検査装置および平面基板収納装置

Also Published As

Publication number Publication date
JPH0530362Y2 (enrdf_load_stackoverflow) 1993-08-03

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