JPH0530362Y2 - - Google Patents

Info

Publication number
JPH0530362Y2
JPH0530362Y2 JP1985016338U JP1633885U JPH0530362Y2 JP H0530362 Y2 JPH0530362 Y2 JP H0530362Y2 JP 1985016338 U JP1985016338 U JP 1985016338U JP 1633885 U JP1633885 U JP 1633885U JP H0530362 Y2 JPH0530362 Y2 JP H0530362Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafers
detector
wafer
quartz boat
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1985016338U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61151340U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985016338U priority Critical patent/JPH0530362Y2/ja
Publication of JPS61151340U publication Critical patent/JPS61151340U/ja
Application granted granted Critical
Publication of JPH0530362Y2 publication Critical patent/JPH0530362Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles To Conveyors (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1985016338U 1985-02-07 1985-02-07 Expired - Lifetime JPH0530362Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985016338U JPH0530362Y2 (enrdf_load_stackoverflow) 1985-02-07 1985-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985016338U JPH0530362Y2 (enrdf_load_stackoverflow) 1985-02-07 1985-02-07

Publications (2)

Publication Number Publication Date
JPS61151340U JPS61151340U (enrdf_load_stackoverflow) 1986-09-18
JPH0530362Y2 true JPH0530362Y2 (enrdf_load_stackoverflow) 1993-08-03

Family

ID=30503017

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985016338U Expired - Lifetime JPH0530362Y2 (enrdf_load_stackoverflow) 1985-02-07 1985-02-07

Country Status (1)

Country Link
JP (1) JPH0530362Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4538883B2 (ja) * 2000-02-25 2010-09-08 株式会社ニコン 平面基板観察装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5993140U (ja) * 1982-12-15 1984-06-25 株式会社日立国際電気 ウエ−ハ移し替え装置
JPS59195741U (ja) * 1983-06-13 1984-12-26 日本電気株式会社 ウエ−ハ移し替え装置
JPS59195051U (ja) * 1983-06-14 1984-12-25 日本ケ−ブル株式会社 握索機の不良握索検出器

Also Published As

Publication number Publication date
JPS61151340U (enrdf_load_stackoverflow) 1986-09-18

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