JPS61192449U - - Google Patents

Info

Publication number
JPS61192449U
JPS61192449U JP7721185U JP7721185U JPS61192449U JP S61192449 U JPS61192449 U JP S61192449U JP 7721185 U JP7721185 U JP 7721185U JP 7721185 U JP7721185 U JP 7721185U JP S61192449 U JPS61192449 U JP S61192449U
Authority
JP
Japan
Prior art keywords
arm
orientation flat
operating amount
changes
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7721185U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7721185U priority Critical patent/JPS61192449U/ja
Publication of JPS61192449U publication Critical patent/JPS61192449U/ja
Pending legal-status Critical Current

Links

JP7721185U 1985-05-22 1985-05-22 Pending JPS61192449U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7721185U JPS61192449U (enrdf_load_stackoverflow) 1985-05-22 1985-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7721185U JPS61192449U (enrdf_load_stackoverflow) 1985-05-22 1985-05-22

Publications (1)

Publication Number Publication Date
JPS61192449U true JPS61192449U (enrdf_load_stackoverflow) 1986-11-29

Family

ID=30620067

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7721185U Pending JPS61192449U (enrdf_load_stackoverflow) 1985-05-22 1985-05-22

Country Status (1)

Country Link
JP (1) JPS61192449U (enrdf_load_stackoverflow)

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