JPS5986950U - 研磨加工装置 - Google Patents

研磨加工装置

Info

Publication number
JPS5986950U
JPS5986950U JP13754483U JP13754483U JPS5986950U JP S5986950 U JPS5986950 U JP S5986950U JP 13754483 U JP13754483 U JP 13754483U JP 13754483 U JP13754483 U JP 13754483U JP S5986950 U JPS5986950 U JP S5986950U
Authority
JP
Japan
Prior art keywords
tank
utility
polishing
processing apparatus
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13754483U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0518048Y2 (enrdf_load_stackoverflow
Inventor
大野 家建
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP13754483U priority Critical patent/JPS5986950U/ja
Publication of JPS5986950U publication Critical patent/JPS5986950U/ja
Application granted granted Critical
Publication of JPH0518048Y2 publication Critical patent/JPH0518048Y2/ja
Granted legal-status Critical Current

Links

JP13754483U 1983-09-05 1983-09-05 研磨加工装置 Granted JPS5986950U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13754483U JPS5986950U (ja) 1983-09-05 1983-09-05 研磨加工装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13754483U JPS5986950U (ja) 1983-09-05 1983-09-05 研磨加工装置

Publications (2)

Publication Number Publication Date
JPS5986950U true JPS5986950U (ja) 1984-06-12
JPH0518048Y2 JPH0518048Y2 (enrdf_load_stackoverflow) 1993-05-13

Family

ID=30308908

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13754483U Granted JPS5986950U (ja) 1983-09-05 1983-09-05 研磨加工装置

Country Status (1)

Country Link
JP (1) JPS5986950U (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0518048Y2 (enrdf_load_stackoverflow) 1993-05-13

Similar Documents

Publication Publication Date Title
US20040166788A1 (en) Sanding disc
JPS5986950U (ja) 研磨加工装置
JP2002126981A (ja) 円板状部材周縁部研磨装置
JP3128259B2 (ja) 床研磨機及び床研磨方法
JPH10315121A (ja) 平面研磨装置
JPH02303759A (ja) ウェハ周縁部の研磨方法
JPH08521U (ja) 研磨用具
JPH04129656A (ja) 半導体ウエハの面取加工装置
JP3024557U (ja) 扁平な円筒の外周面に、布状の研磨材を巻きつけた研磨用具
JP3004012U (ja) 回転砥石
JPH10100064A (ja) 研磨装置及び研磨方法
JPH069869U (ja) 研磨具
JPH0752043A (ja) アンギュラー研削砥石成形用ロータリードレッサー
JP2585486Y2 (ja) 半導体ウェハの研磨装置
JP3022487U (ja) 電動ワックス掛け機
JPS5875665U (ja) 磁気ヘツド用円筒研磨機
JPS6176278A (ja) 複合式回転研摩材
JPS58211864A (ja) 両面サンド研磨材
JPS5871072A (ja) 砥石
JPH04109849U (ja) 碍子サンド部の研磨装置
JPH061327Y2 (ja) 研磨用砥石車
US3579925A (en) Abrasive wheel
JPS58126050A (ja) 円錐形または円とう形物体の表面研磨装置
JPS6042061Y2 (ja) 液中研摩装置
JPS62141463U (enrdf_load_stackoverflow)