JPS5983032U - Vertical epitaxial equipment - Google Patents
Vertical epitaxial equipmentInfo
- Publication number
- JPS5983032U JPS5983032U JP17939382U JP17939382U JPS5983032U JP S5983032 U JPS5983032 U JP S5983032U JP 17939382 U JP17939382 U JP 17939382U JP 17939382 U JP17939382 U JP 17939382U JP S5983032 U JPS5983032 U JP S5983032U
- Authority
- JP
- Japan
- Prior art keywords
- base
- quartz
- vertical
- bell jar
- vertical epitaxial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図および第２図は従来の縦型エピタキシャル装置の
それぞれ異なる例を示す概要断面図、第３図は本考案に
よる縦型エピタキシャル装置の一実施例を示す概要断面
図、第４図は本考案の他の実施例を示す概要断面図であ
る。
１・・・・・・基台、２・・・・・・シール部材、３．
１４゜１６・・、・・・・石英ベルジャ、４・・・・・
・気密室、５・・・・・・サ ゛セプタ、６・・・・
・・基板、７・・・・・・ノズル、８・・・・・・ＲＦ
コイル、９・・・・・・排気管、１０・・・・・・クリ
ンベンチ側板、１１．１８・・・・・・金属ベルジャ、
１２・・・・・・冷却管、１３・・・・・・支持片、１
５・・・・・・供給口、１７・・・・・・クランプ片、
１９・・・・・・弾性体、２０・・・・・・係合子、２
１・・・・・・突起、２２・・・・・・貫通孔、２３・
・・・・・冷却ジャケット、２４・・・・・・ベルジャ
昇降機構、２５・・・・・・リング。1 and 2 are schematic cross-sectional views showing different examples of conventional vertical epitaxial devices, FIG. 3 is a schematic cross-sectional view showing one embodiment of the vertical epitaxial device according to the present invention, and FIG. 4 is a schematic cross-sectional view showing different examples of conventional vertical epitaxial devices. FIG. 3 is a schematic cross-sectional view showing another embodiment of the invention. 1...Base, 2...Seal member, 3.
14゜16... Quartz bell jar, 4...
・Airtight room, 5...Scepter, 6...
...Substrate, 7...Nozzle, 8...RF
Coil, 9...Exhaust pipe, 10...Clean bench side plate, 11.18...Metal bell jar,
12... Cooling pipe, 13... Support piece, 1
5... Supply port, 17... Clamp piece,
19...Elastic body, 20...Engager, 2
1...Protrusion, 22...Through hole, 23.
... Cooling jacket, 24 ... Bell jar lifting mechanism, 25 ... Ring.
Claims (1)
サセプタの上に載置した基板上に半導体物質のエピタキ
シャル薄膜を気相成長させる縦型エピタキシキル装置に
おいて、気密室を基台と石英ベルジャとによって構成す
る・と共に、前記石英ベルジャの外側に保合子により離
脱可能に金属ベルジャを被せることを特徴とする縦型エ
ピタキシャル装置。 ２ 基台と対向する石英ベルジャの下端にフランジ部を
形成し、このフランジ部が弾性体を介して金属ベルジャ
により基台に向けてシールのため押圧されるように構成
されていることを特徴とする実用新案登録請求の範囲第
１項記載の縦型エピタキシャル装置。 ３ 基台の気密室を形成する部分が、石英ベルジャをシ
ールする面より低くなるように構成されていることを特
徴とする実用新案登録請求の範囲第１または２項記載の
縦型エピタキシャル装置。[Claims for Utility Model Registration] ■ In a vertical epitaxy machine that forms an airtight chamber around a horizontally provided susceptor and grows an epitaxial thin film of a semiconductor material in a vapor phase on a substrate placed on the susceptor. A vertical epitaxial device, characterized in that an airtight chamber is constituted by a base and a quartz belljar, and a metal belljar is removably covered on the outside of the quartz belljar with a retainer. 2. A flange portion is formed at the lower end of the quartz bell jar facing the base, and the flange portion is configured to be pressed toward the base by the metal bell jar via an elastic body for sealing. A vertical epitaxial device according to claim 1 of the utility model registration claim. 3. The vertical epitaxial device according to claim 1 or 2, wherein the portion of the base that forms the airtight chamber is configured to be lower than the surface that seals the quartz bell jar.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17939382U JPS5983032U (en) | 1982-11-27 | 1982-11-27 | Vertical epitaxial equipment |
| DE19833342586 DE3342586C2 (en) | 1982-11-27 | 1983-11-25 | Apparatus for gas phase epitaxy |
| KR2019860008872U KR860001742Y1 (en) | 1982-11-27 | 1986-06-24 | Ephitactial apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17939382U JPS5983032U (en) | 1982-11-27 | 1982-11-27 | Vertical epitaxial equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5983032U true JPS5983032U (en) | 1984-06-05 |
Family
ID=30389242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17939382U Pending JPS5983032U (en) | 1982-11-27 | 1982-11-27 | Vertical epitaxial equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5983032U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50537A (en) * | 1973-05-03 | 1975-01-07 |
-
1982
- 1982-11-27 JP JP17939382U patent/JPS5983032U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50537A (en) * | 1973-05-03 | 1975-01-07 |
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