JPS5983031U - Vertical vapor phase growth equipment - Google Patents
Vertical vapor phase growth equipmentInfo
- Publication number
- JPS5983031U JPS5983031U JP17939282U JP17939282U JPS5983031U JP S5983031 U JPS5983031 U JP S5983031U JP 17939282 U JP17939282 U JP 17939282U JP 17939282 U JP17939282 U JP 17939282U JP S5983031 U JPS5983031 U JP S5983031U
- Authority
- JP
- Japan
- Prior art keywords
- ring
- vapor phase
- phase growth
- susceptor
- vertical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は従来の縦型気相成長装置の一例を示す概要断面
図、第２図は本考案による縦型気相成長装置の一実施例
を示す概要断面図である。
１・・・・・・軸、２・・・・・・サセプタ、３・・囲
気密室、４・・・・・・ベース、５．１１・・・・・・
ベルジャ、６・・・・・・基板、７．１９・・・・・・
シリンダ、８・・・・・・ＲＦコイル、９・・・・・・
ノズル、１０・・・・・・リング、１２．１３・・川・
シール部材辷１４・・曲支柱、１５，１６・・・・・・
アーム、１７・・・・・・スリーブ、２０・・・・・・
ピストンロンド、２１・・・−・・ガイド溝、２３・・
・・・・係合子、２４・・・・・・クランプ部材。FIG. 1 is a schematic sectional view showing an example of a conventional vertical vapor phase growth apparatus, and FIG. 2 is a schematic sectional view showing an embodiment of the vertical vapor growth apparatus according to the present invention. 1...Axis, 2...Susceptor, 3...Airtight enclosure, 4...Base, 5.11...
Belljar, 6... Board, 7.19...
Cylinder, 8...RF coil, 9...
Nozzle, 10...Ring, 12.13...River...
Seal member side 14...Curved support, 15, 16...
Arm, 17...Sleeve, 20...
Piston rond, 21...-Guide groove, 23...
... Engagement element, 24... Clamp member.
Claims (1)
気相成長装置において、前記サセプタに対し同心的に位
置してベース上に載置されるリングと、前記サセプタを
被うように前記リング上に載置されるベルジャと、前記
ベース、リングおよびベルジャのそれぞれの間に介在さ
れるシール部材と、前記リングおよびベルジャを旋回可
能に昇降させるための駆動機構と、前記ベルジャおよび
リングをベースに向けて押圧するクランプ部材とを具備
することを特徴とする縦型気相成長装置。 ２ リングの高さがサセプタ上面と略等しくなされてい
る実用新案登録請求の範囲第１項記載の縦型気相成長装
置。[Claims for Utility Model Registration] ■ In a vertical vapor phase growth apparatus in which a susceptor is horizontally provided on a shaft extending vertically, a ring placed on a base and placed concentrically with respect to the susceptor; a bell jar placed on the ring so as to cover the susceptor; a sealing member interposed between the base, the ring and the bell jar; and a drive mechanism for pivotably raising and lowering the ring and the bell jar. and a clamp member that presses the bell jar and the ring toward the base. 2. The vertical vapor phase growth apparatus according to claim 1, wherein the height of the ring is approximately equal to the upper surface of the susceptor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17939282U JPS5983031U (en) | 1982-11-27 | 1982-11-27 | Vertical vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17939282U JPS5983031U (en) | 1982-11-27 | 1982-11-27 | Vertical vapor phase growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5983031U true JPS5983031U (en) | 1984-06-05 |
Family
ID=30389241
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17939282U Pending JPS5983031U (en) | 1982-11-27 | 1982-11-27 | Vertical vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5983031U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61191474U (en) * | 1985-05-21 | 1986-11-28 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234669A (en) * | 1975-09-11 | 1977-03-16 | Kokusai Electric Co Ltd | Gaseous phase growing apparatus of semiconductor |
-
1982
- 1982-11-27 JP JP17939282U patent/JPS5983031U/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5234669A (en) * | 1975-09-11 | 1977-03-16 | Kokusai Electric Co Ltd | Gaseous phase growing apparatus of semiconductor |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61191474U (en) * | 1985-05-21 | 1986-11-28 |
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