JPS60147676U - Vapor phase growth equipment - Google Patents
Vapor phase growth equipmentInfo
- Publication number
- JPS60147676U JPS60147676U JP3571984U JP3571984U JPS60147676U JP S60147676 U JPS60147676 U JP S60147676U JP 3571984 U JP3571984 U JP 3571984U JP 3571984 U JP3571984 U JP 3571984U JP S60147676 U JPS60147676 U JP S60147676U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth equipment
- groove
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
−第１図は従来例も断面図、第２図は本考案の一実施例
における要部断面図、第３図は本考案の他の実施例を示
す要部断面図、第４図は第３図に示したサセプタの平面
図である。
１１・・・基台、１２・・・チャンバ、１４．２６・・
・サセプタ、１６・・・半導体基板（ウェハ）、１７，
２５・・・ワークコイル、１８・・・ノズル、１９・・
・排気口、２１．２７・・・溝、２４・・・石英ガラス
チューブ。- Fig. 1 is a sectional view of the conventional example, Fig. 2 is a sectional view of the main part of an embodiment of the present invention, Fig. 3 is a sectional view of the main part of another embodiment of the invention, and Fig. 4 is a sectional view of the main part of an embodiment of the present invention. FIG. 4 is a plan view of the susceptor shown in FIG. 3; 11... Base, 12... Chamber, 14.26...
- Susceptor, 16... semiconductor substrate (wafer), 17,
25... Work coil, 18... Nozzle, 19...
・Exhaust port, 21.27...groove, 24...quartz glass tube.
Claims (2)
けた気相成長装置。(1) A vapor phase growth apparatus in which a groove is provided near the end of the surface of the susceptor that is in contact with the gas flow.
登録請求の範囲第１項記載の縦型気相成長装置。(2) The vertical vapor phase growth apparatus according to claim 1, which is a registered utility model, characterized in that the groove has a groove depth≧groove width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3571984U JPS60147676U (en) | 1984-03-12 | 1984-03-12 | Vapor phase growth equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3571984U JPS60147676U (en) | 1984-03-12 | 1984-03-12 | Vapor phase growth equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS60147676U true JPS60147676U (en) | 1985-10-01 |
Family
ID=30540253
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3571984U Pending JPS60147676U (en) | 1984-03-12 | 1984-03-12 | Vapor phase growth equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60147676U (en) |
-
1984
- 1984-03-12 JP JP3571984U patent/JPS60147676U/en active Pending
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