JPS59117139U - semiconductor manufacturing equipment - Google Patents
semiconductor manufacturing equipmentInfo
- Publication number
- JPS59117139U JPS59117139U JP1137383U JP1137383U JPS59117139U JP S59117139 U JPS59117139 U JP S59117139U JP 1137383 U JP1137383 U JP 1137383U JP 1137383 U JP1137383 U JP 1137383U JP S59117139 U JPS59117139 U JP S59117139U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor manufacturing
- manufacturing equipment
- pelger
- utility
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図は本考案の実施例の断面図である。
１・・・半導体基板、２・・・基板支持体、３・・・高
周波加熱装置、４・・・石英ペルジャー、５・・・石英
管、６・・・金属製ペルジャー。FIG. 1 is a sectional view of an embodiment of the present invention. DESCRIPTION OF SYMBOLS 1... Semiconductor substrate, 2... Substrate support body, 3... High frequency heating device, 4... Quartz Pel jar, 5... Quartz tube, 6... Metal Pel jar.
Claims (1)
ることを特徴とする半導体製造装置。A semiconductor manufacturing device characterized by having a heat reflective film on a Pelger surface forming a growth reaction chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1137383U JPS59117139U (en) | 1983-01-28 | 1983-01-28 | semiconductor manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1137383U JPS59117139U (en) | 1983-01-28 | 1983-01-28 | semiconductor manufacturing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS59117139U true JPS59117139U (en) | 1984-08-07 |
Family
ID=30142801
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1137383U Pending JPS59117139U (en) | 1983-01-28 | 1983-01-28 | semiconductor manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59117139U (en) |
-
1983
- 1983-01-28 JP JP1137383U patent/JPS59117139U/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS59117139U (en) | semiconductor manufacturing equipment | |
| JPS60135597U (en) | Rare earth magnet heat treatment base plate | |
| JPS6016998U (en) | Ceramic firing jig | |
| JPS5895634U (en) | Annealing equipment | |
| JPS6422025U (en) | ||
| JPS58168574U (en) | Vapor phase growth reactor | |
| JPS58172435U (en) | Film forming equipment | |
| JPS60136136U (en) | semiconductor manufacturing equipment | |
| JPS59111039U (en) | Quartz tube for diffusion | |
| JPS6089282U (en) | Susceptor for vapor phase growth | |
| JPS59159941U (en) | Semiconductor device manufacturing equipment | |
| JPS599083U (en) | Vapor phase growth equipment | |
| JPS58138331U (en) | liquid phase growth equipment | |
| JPS58129634U (en) | Ampoule for manufacturing semiconductor crystals | |
| JPS58168575U (en) | Metal-organic vapor phase epitaxy equipment | |
| JPS6035536U (en) | Reduced pressure vapor phase growth equipment | |
| JPS6120033U (en) | Vapor phase growth equipment | |
| JPS60185331U (en) | Vapor phase growth equipment | |
| JPS5951071U (en) | epitaxial growth equipment | |
| JPS6139937U (en) | Diffusion furnace type vapor phase growth equipment | |
| JPS60147676U (en) | Vapor phase growth equipment | |
| JPS5812940U (en) | Susceptor for vapor phase growth equipment | |
| JPS58172952U (en) | Heat fixing device | |
| JPS619835U (en) | semiconductor manufacturing equipment | |
| JPS59140435U (en) | Vapor phase growth equipment |