JPS599083U - Vapor phase growth equipment - Google Patents
Vapor phase growth equipmentInfo
- Publication number
- JPS599083U JPS599083U JP10269082U JP10269082U JPS599083U JP S599083 U JPS599083 U JP S599083U JP 10269082 U JP10269082 U JP 10269082U JP 10269082 U JP10269082 U JP 10269082U JP S599083 U JPS599083 U JP S599083U
- Authority
- JP
- Japan
- Prior art keywords
- metal
- vapor phase
- phase growth
- belljar
- growth equipment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
図は本考案の一実施例における断面図である。
2・・・石英ガラスベルジャ、3・・・金属ベルジャ、
′ 4・・・高周波誘導加熱コイル。The figure is a sectional view of one embodiment of the present invention. 2... Quartz glass bell jar, 3... Metal bell jar,
' 4...High frequency induction heating coil.
Claims (1)
周波誘導加熱コイルを有する気相成長装置において、前
記金属ベルジャの内側表面を鏡面研磨にするか金、銀、
アルミニウム等の光反射率の大きな金属の鍍金或いは前
記金属の単層或いは多層薄膜を被覆した気相成長装置の
金属ベルジャ。In a vapor phase growth apparatus having a quartz glass belljar on the inside, a metal belljar on the outside, and a high-frequency induction heating coil, the inner surface of the metal belljar is mirror-polished or gold, silver, gold, silver, etc.
A metal bell jar for a vapor phase growth apparatus, which is plated with a metal having a high light reflectance such as aluminum, or coated with a single layer or multilayer thin film of the metal.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10269082U JPS599083U (en) | 1982-07-07 | 1982-07-07 | Vapor phase growth equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10269082U JPS599083U (en) | 1982-07-07 | 1982-07-07 | Vapor phase growth equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS599083U true JPS599083U (en) | 1984-01-20 |
JPS6113562Y2 JPS6113562Y2 (en) | 1986-04-26 |
Family
ID=30241927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10269082U Granted JPS599083U (en) | 1982-07-07 | 1982-07-07 | Vapor phase growth equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS599083U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61191474U (en) * | 1985-05-21 | 1986-11-28 |
-
1982
- 1982-07-07 JP JP10269082U patent/JPS599083U/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61191474U (en) * | 1985-05-21 | 1986-11-28 |
Also Published As
Publication number | Publication date |
---|---|
JPS6113562Y2 (en) | 1986-04-26 |
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