JPS599082U - Radiation reflector for vapor phase growth equipment - Google Patents

Radiation reflector for vapor phase growth equipment

Info

Publication number
JPS599082U
JPS599082U JP10268982U JP10268982U JPS599082U JP S599082 U JPS599082 U JP S599082U JP 10268982 U JP10268982 U JP 10268982U JP 10268982 U JP10268982 U JP 10268982U JP S599082 U JPS599082 U JP S599082U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth equipment
radiation reflector
lamp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10268982U
Other languages
Japanese (ja)
Inventor
後藤　泰山
Original Assignee
東芝機械株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 東芝機械株式会社 filed Critical 東芝機械株式会社
Priority to JP10268982U priority Critical patent/JPS599082U/en
Publication of JPS599082U publication Critical patent/JPS599082U/en
Pending legal-status Critical Current

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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は本考案の一実施例における断面図である。 １・・・ベルジャ、３・・・ウェハ、４・・・ランプ、
６・・・輻射反射板。The figure is a sectional view of one embodiment of the present invention. 1... bell jar, 3... wafer, 4... lamp,
6...Radiation reflector.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ベルジャ内のウェハをランプにより加熱する気相成長装
置において、表面へ銀アルミニウム或いはそれらの合金
の光反射率の良好な金属を鍍金するか或いはこれら金属
の単層或いは多層薄膜を被覆した輻射反射板の前面へ前
記ランプを設置した気相成長装置の輻射反射板。In a vapor phase growth apparatus that heats a wafer in a bell jar with a lamp, a radiation reflecting plate whose surface is plated with a metal with good light reflectivity such as silver aluminum or an alloy thereof, or coated with a single layer or multilayer thin film of these metals. A radiation reflecting plate of a vapor phase growth apparatus in which the lamp is installed in front of.
JP10268982U 1982-07-07 1982-07-07 Radiation reflector for vapor phase growth equipment Pending JPS599082U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10268982U JPS599082U (en) 1982-07-07 1982-07-07 Radiation reflector for vapor phase growth equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10268982U JPS599082U (en) 1982-07-07 1982-07-07 Radiation reflector for vapor phase growth equipment

Publications (1)

Publication Number Publication Date
JPS599082U true JPS599082U (en) 1984-01-20

Family

ID=30241925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10268982U Pending JPS599082U (en) 1982-07-07 1982-07-07 Radiation reflector for vapor phase growth equipment

Country Status (1)

Country Link
JP (1) JPS599082U (en)

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