JPS5977225U - 半導体素子製造装置 - Google Patents

半導体素子製造装置

Info

Publication number
JPS5977225U
JPS5977225U JP17282682U JP17282682U JPS5977225U JP S5977225 U JPS5977225 U JP S5977225U JP 17282682 U JP17282682 U JP 17282682U JP 17282682 U JP17282682 U JP 17282682U JP S5977225 U JPS5977225 U JP S5977225U
Authority
JP
Japan
Prior art keywords
semiconductor device
device manufacturing
manufacturing equipment
processing
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17282682U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0128671Y2 (enrdf_load_stackoverflow
Inventor
泰司 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP17282682U priority Critical patent/JPS5977225U/ja
Publication of JPS5977225U publication Critical patent/JPS5977225U/ja
Application granted granted Critical
Publication of JPH0128671Y2 publication Critical patent/JPH0128671Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP17282682U 1982-11-15 1982-11-15 半導体素子製造装置 Granted JPS5977225U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17282682U JPS5977225U (ja) 1982-11-15 1982-11-15 半導体素子製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17282682U JPS5977225U (ja) 1982-11-15 1982-11-15 半導体素子製造装置

Publications (2)

Publication Number Publication Date
JPS5977225U true JPS5977225U (ja) 1984-05-25
JPH0128671Y2 JPH0128671Y2 (enrdf_load_stackoverflow) 1989-08-31

Family

ID=30376632

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17282682U Granted JPS5977225U (ja) 1982-11-15 1982-11-15 半導体素子製造装置

Country Status (1)

Country Link
JP (1) JPS5977225U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237923U (enrdf_load_stackoverflow) * 1985-08-26 1987-03-06
JPH01205423A (ja) * 1988-02-10 1989-08-17 Tokyo Electron Ltd レジスト塗布装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057180A (enrdf_load_stackoverflow) * 1973-09-18 1975-05-19
JPS5327287A (en) * 1976-08-27 1978-03-14 Nanbi Kougiyou Kk Device for switching car head lamp and varying light intensity thereof
JPS544667U (enrdf_load_stackoverflow) * 1977-06-13 1979-01-12
JPS56106451U (enrdf_load_stackoverflow) * 1980-01-16 1981-08-19
JPS56161539A (en) * 1980-05-16 1981-12-11 Fujitsu Ltd Feeding method for photoresist solution
JPS57121136U (enrdf_load_stackoverflow) * 1981-01-23 1982-07-28
JPS5831530A (ja) * 1981-08-19 1983-02-24 Nec Kyushu Ltd 半導体装置の製造装置
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS58180630U (ja) * 1982-05-25 1983-12-02 富士通株式会社 レジスト塗布装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5057180A (enrdf_load_stackoverflow) * 1973-09-18 1975-05-19
JPS5327287A (en) * 1976-08-27 1978-03-14 Nanbi Kougiyou Kk Device for switching car head lamp and varying light intensity thereof
JPS544667U (enrdf_load_stackoverflow) * 1977-06-13 1979-01-12
JPS56106451U (enrdf_load_stackoverflow) * 1980-01-16 1981-08-19
JPS56161539A (en) * 1980-05-16 1981-12-11 Fujitsu Ltd Feeding method for photoresist solution
JPS57121136U (enrdf_load_stackoverflow) * 1981-01-23 1982-07-28
JPS5831530A (ja) * 1981-08-19 1983-02-24 Nec Kyushu Ltd 半導体装置の製造装置
JPS5835952U (ja) * 1981-09-03 1983-03-09 三菱電機株式会社 液体噴霧装置
JPS58180630U (ja) * 1982-05-25 1983-12-02 富士通株式会社 レジスト塗布装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6237923U (enrdf_load_stackoverflow) * 1985-08-26 1987-03-06
JPH01205423A (ja) * 1988-02-10 1989-08-17 Tokyo Electron Ltd レジスト塗布装置

Also Published As

Publication number Publication date
JPH0128671Y2 (enrdf_load_stackoverflow) 1989-08-31

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