JPS5969966U - グロ−放電発生装置 - Google Patents

グロ−放電発生装置

Info

Publication number
JPS5969966U
JPS5969966U JP16684682U JP16684682U JPS5969966U JP S5969966 U JPS5969966 U JP S5969966U JP 16684682 U JP16684682 U JP 16684682U JP 16684682 U JP16684682 U JP 16684682U JP S5969966 U JPS5969966 U JP S5969966U
Authority
JP
Japan
Prior art keywords
glow discharge
discharge generator
frequency
vacuum tube
exhaust chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16684682U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6135561Y2 (enExample
Inventor
金田一　要三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP16684682U priority Critical patent/JPS5969966U/ja
Publication of JPS5969966U publication Critical patent/JPS5969966U/ja
Application granted granted Critical
Publication of JPS6135561Y2 publication Critical patent/JPS6135561Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP16684682U 1982-11-02 1982-11-02 グロ−放電発生装置 Granted JPS5969966U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16684682U JPS5969966U (ja) 1982-11-02 1982-11-02 グロ−放電発生装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16684682U JPS5969966U (ja) 1982-11-02 1982-11-02 グロ−放電発生装置

Publications (2)

Publication Number Publication Date
JPS5969966U true JPS5969966U (ja) 1984-05-12
JPS6135561Y2 JPS6135561Y2 (enExample) 1986-10-16

Family

ID=30365180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16684682U Granted JPS5969966U (ja) 1982-11-02 1982-11-02 グロ−放電発生装置

Country Status (1)

Country Link
JP (1) JPS5969966U (enExample)

Also Published As

Publication number Publication date
JPS6135561Y2 (enExample) 1986-10-16

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