JPS5954283A - 半導体レ−ザ装置およびその製造方法 - Google Patents
半導体レ−ザ装置およびその製造方法Info
- Publication number
- JPS5954283A JPS5954283A JP16382582A JP16382582A JPS5954283A JP S5954283 A JPS5954283 A JP S5954283A JP 16382582 A JP16382582 A JP 16382582A JP 16382582 A JP16382582 A JP 16382582A JP S5954283 A JPS5954283 A JP S5954283A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- type
- conductivity type
- optical waveguide
- cladding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 230000004888 barrier function Effects 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 10
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000005253 cladding Methods 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 3
- 239000004020 conductor Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 3
- 239000000969 carrier Substances 0.000 abstract description 2
- 230000010355 oscillation Effects 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 98
- 238000005530 etching Methods 0.000 description 13
- 239000007788 liquid Substances 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- WURBVZBTWMNKQT-UHFFFAOYSA-N 1-(4-chlorophenoxy)-3,3-dimethyl-1-(1,2,4-triazol-1-yl)butan-2-one Chemical compound C1=NC=NN1C(C(=O)C(C)(C)C)OC1=CC=C(Cl)C=C1 WURBVZBTWMNKQT-UHFFFAOYSA-N 0.000 description 1
- ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical compound [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 description 1
- 241000009881 Aega Species 0.000 description 1
- 244000003377 Allium tuberosum Species 0.000 description 1
- 235000005338 Allium tuberosum Nutrition 0.000 description 1
- 101100281119 Brachyspira hyodysenteriae flaA1 gene Proteins 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- 101100120228 Pseudomonas aeruginosa fliC gene Proteins 0.000 description 1
- 244000269722 Thea sinensis Species 0.000 description 1
- 241001648319 Toronia toru Species 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 101150071682 flaA gene Proteins 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 229910052740 iodine Inorganic materials 0.000 description 1
- 239000011630 iodine Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/2004—Confining in the direction perpendicular to the layer structure
- H01S5/2009—Confining in the direction perpendicular to the layer structure by using electron barrier layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/227—Buried mesa structure ; Striped active layer
- H01S5/2275—Buried mesa structure ; Striped active layer mesa created by etching
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16382582A JPS5954283A (ja) | 1982-09-22 | 1982-09-22 | 半導体レ−ザ装置およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16382582A JPS5954283A (ja) | 1982-09-22 | 1982-09-22 | 半導体レ−ザ装置およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5954283A true JPS5954283A (ja) | 1984-03-29 |
| JPS6354234B2 JPS6354234B2 (enrdf_load_stackoverflow) | 1988-10-27 |
Family
ID=15781447
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16382582A Granted JPS5954283A (ja) | 1982-09-22 | 1982-09-22 | 半導体レ−ザ装置およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5954283A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6200826B1 (en) * | 1996-12-30 | 2001-03-13 | Hyundai Electronics Industries Co., Ltd. | Method of fabricating a reverse mesa ridge waveguide type laser diode |
| KR100458251B1 (ko) * | 2002-10-25 | 2004-11-26 | 엘지전자 주식회사 | 화합물 반도체 레이저 다이오드 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5541741A (en) * | 1978-09-20 | 1980-03-24 | Hitachi Ltd | Semiconductor laser device |
-
1982
- 1982-09-22 JP JP16382582A patent/JPS5954283A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5541741A (en) * | 1978-09-20 | 1980-03-24 | Hitachi Ltd | Semiconductor laser device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6200826B1 (en) * | 1996-12-30 | 2001-03-13 | Hyundai Electronics Industries Co., Ltd. | Method of fabricating a reverse mesa ridge waveguide type laser diode |
| KR100458251B1 (ko) * | 2002-10-25 | 2004-11-26 | 엘지전자 주식회사 | 화합물 반도체 레이저 다이오드 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6354234B2 (enrdf_load_stackoverflow) | 1988-10-27 |
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