JPS5950543A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5950543A
JPS5950543A JP16084082A JP16084082A JPS5950543A JP S5950543 A JPS5950543 A JP S5950543A JP 16084082 A JP16084082 A JP 16084082A JP 16084082 A JP16084082 A JP 16084082A JP S5950543 A JPS5950543 A JP S5950543A
Authority
JP
Japan
Prior art keywords
film
wiring
psg
polyimide resin
resin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16084082A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0324779B2 (enExample
Inventor
Takayuki Matsui
孝行 松井
Jun Kanamori
金森　順
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP16084082A priority Critical patent/JPS5950543A/ja
Publication of JPS5950543A publication Critical patent/JPS5950543A/ja
Publication of JPH0324779B2 publication Critical patent/JPH0324779B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Weting (AREA)
JP16084082A 1982-09-17 1982-09-17 半導体装置の製造方法 Granted JPS5950543A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16084082A JPS5950543A (ja) 1982-09-17 1982-09-17 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16084082A JPS5950543A (ja) 1982-09-17 1982-09-17 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5950543A true JPS5950543A (ja) 1984-03-23
JPH0324779B2 JPH0324779B2 (enExample) 1991-04-04

Family

ID=15723539

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16084082A Granted JPS5950543A (ja) 1982-09-17 1982-09-17 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5950543A (enExample)

Also Published As

Publication number Publication date
JPH0324779B2 (enExample) 1991-04-04

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