JPS5943547A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS5943547A
JPS5943547A JP15411582A JP15411582A JPS5943547A JP S5943547 A JPS5943547 A JP S5943547A JP 15411582 A JP15411582 A JP 15411582A JP 15411582 A JP15411582 A JP 15411582A JP S5943547 A JPS5943547 A JP S5943547A
Authority
JP
Japan
Prior art keywords
film
semiconductor
manufacturing
etching
polycrystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15411582A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6320018B2 (enrdf_load_stackoverflow
Inventor
Nobuo Sasaki
伸夫 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15411582A priority Critical patent/JPS5943547A/ja
Publication of JPS5943547A publication Critical patent/JPS5943547A/ja
Publication of JPS6320018B2 publication Critical patent/JPS6320018B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76294—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using selective deposition of single crystal silicon, i.e. SEG techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
JP15411582A 1982-09-03 1982-09-03 半導体装置の製造方法 Granted JPS5943547A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15411582A JPS5943547A (ja) 1982-09-03 1982-09-03 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15411582A JPS5943547A (ja) 1982-09-03 1982-09-03 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS5943547A true JPS5943547A (ja) 1984-03-10
JPS6320018B2 JPS6320018B2 (enrdf_load_stackoverflow) 1988-04-26

Family

ID=15577248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15411582A Granted JPS5943547A (ja) 1982-09-03 1982-09-03 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS5943547A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63258040A (ja) * 1987-04-15 1988-10-25 Nec Corp 素子分離領域の形成方法
US4824797A (en) * 1985-10-31 1989-04-25 International Business Machines Corporation Self-aligned channel stop

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4824797A (en) * 1985-10-31 1989-04-25 International Business Machines Corporation Self-aligned channel stop
JPS63258040A (ja) * 1987-04-15 1988-10-25 Nec Corp 素子分離領域の形成方法

Also Published As

Publication number Publication date
JPS6320018B2 (enrdf_load_stackoverflow) 1988-04-26

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