JPS5938384A - 真空蒸着装置のための蒸発容器 - Google Patents

真空蒸着装置のための蒸発容器

Info

Publication number
JPS5938384A
JPS5938384A JP58132021A JP13202183A JPS5938384A JP S5938384 A JPS5938384 A JP S5938384A JP 58132021 A JP58132021 A JP 58132021A JP 13202183 A JP13202183 A JP 13202183A JP S5938384 A JPS5938384 A JP S5938384A
Authority
JP
Japan
Prior art keywords
cooling
evaporation
evaporation vessel
metal body
guide mechanism
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58132021A
Other languages
English (en)
Japanese (ja)
Other versions
JPH032948B2 (enExample
Inventor
アルベルト・フオイア−シユタイン
クラウス−ユルゲン・ハイムバツハ
ヘルム−ト・ヴアルシヤイト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Priority to GB08332412A priority Critical patent/GB2144317B/en
Priority to FR8402592A priority patent/FR2550054B1/fr
Publication of JPS5938384A publication Critical patent/JPS5938384A/ja
Publication of JPH032948B2 publication Critical patent/JPH032948B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
JP58132021A 1982-07-29 1983-07-21 真空蒸着装置のための蒸発容器 Granted JPS5938384A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GB08332412A GB2144317B (en) 1983-07-21 1983-12-05 Drying animals and collecting hair
FR8402592A FR2550054B1 (fr) 1983-07-21 1984-02-21 Appareil pour secher le pelage d'animaux domestiques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3228311A DE3228311C2 (de) 1982-07-29 1982-07-29 Verdampfertiegel für Vakuum-Aufdampfanlagen
DE3228311.3 1982-07-29

Publications (2)

Publication Number Publication Date
JPS5938384A true JPS5938384A (ja) 1984-03-02
JPH032948B2 JPH032948B2 (enExample) 1991-01-17

Family

ID=6169602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58132021A Granted JPS5938384A (ja) 1982-07-29 1983-07-21 真空蒸着装置のための蒸発容器

Country Status (6)

Country Link
US (1) US4530100A (enExample)
JP (1) JPS5938384A (enExample)
CH (1) CH653372A5 (enExample)
DE (1) DE3228311C2 (enExample)
FR (1) FR2531104B1 (enExample)
GB (1) GB2126255B (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0593263A (ja) * 1991-09-30 1993-04-16 Shinkuron:Kk ハースライナおよび蒸着方法
JP2008240305A (ja) * 2007-03-27 2008-10-09 Sanwa Shutter Corp 建具枠の躯体取付金具および躯体取付構造

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4866239A (en) * 1988-05-31 1989-09-12 The Boc Group, Inc. Vapor source assembly with crucible
US5111022A (en) * 1989-08-23 1992-05-05 Tfi Telemark Cooling system for electron beam gun and method
US5473627A (en) * 1992-11-05 1995-12-05 Mdc Vacuum Products Corporation UHV rotating fluid delivery system
DE102019104988A1 (de) * 2019-02-27 2020-08-27 VON ARDENNE Asset GmbH & Co. KG Versorgungsvorrichtung, Verfahren und Prozessieranordnung
KR102761515B1 (ko) * 2019-02-27 2025-02-04 삼성디스플레이 주식회사 증착원 증발 장치 및 그 제조방법
EP4384648A1 (en) 2021-08-12 2024-06-19 Applied Materials, Inc. Evaporator for effective surface area evaporation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2060936A (en) * 1936-02-15 1936-11-17 Todd Comb Equipment Inc Heat exchange means
NL259959A (enExample) * 1960-02-03
DE1262101C2 (de) * 1962-12-15 1973-10-25 Tiegel fuer die verdampfung von stoffen im vakuum mittels elektronenstrahlen, insbesondere zur bandbedampfung
US3414655A (en) * 1966-01-26 1968-12-03 Nat Res Corp Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material
US3360600A (en) * 1966-07-13 1967-12-26 Air Reduction Vapor source assembly
DE3010925A1 (de) * 1980-03-21 1981-10-01 Albrecht G. Prof. Dr. 4600 Dortmund Fischer Gallium-gekuehlte elektronenstrahl-drehtiegel-vakuum-aufdampfanlage

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0593263A (ja) * 1991-09-30 1993-04-16 Shinkuron:Kk ハースライナおよび蒸着方法
JP2008240305A (ja) * 2007-03-27 2008-10-09 Sanwa Shutter Corp 建具枠の躯体取付金具および躯体取付構造

Also Published As

Publication number Publication date
GB8319337D0 (en) 1983-08-17
DE3228311A1 (de) 1984-02-02
FR2531104B1 (fr) 1989-07-28
CH653372A5 (de) 1985-12-31
FR2531104A1 (fr) 1984-02-03
JPH032948B2 (enExample) 1991-01-17
GB2126255A (en) 1984-03-21
DE3228311C2 (de) 1984-07-05
GB2126255B (en) 1985-09-04
US4530100A (en) 1985-07-16

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