JPH032948B2 - - Google Patents
Info
- Publication number
- JPH032948B2 JPH032948B2 JP58132021A JP13202183A JPH032948B2 JP H032948 B2 JPH032948 B2 JP H032948B2 JP 58132021 A JP58132021 A JP 58132021A JP 13202183 A JP13202183 A JP 13202183A JP H032948 B2 JPH032948 B2 JP H032948B2
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- metal body
- evaporation
- evaporation vessel
- guide mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 57
- 239000002826 coolant Substances 0.000 claims description 30
- 238000001704 evaporation Methods 0.000 claims description 24
- 230000008020 evaporation Effects 0.000 claims description 24
- 239000002184 metal Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 230000007246 mechanism Effects 0.000 claims description 19
- 238000005192 partition Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 7
- 239000011796 hollow space material Substances 0.000 claims description 5
- 230000001174 ascending effect Effects 0.000 claims description 4
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000004804 winding Methods 0.000 claims description 3
- 230000000630 rising effect Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 244000089486 Phragmites australis subsp australis Species 0.000 description 1
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000012611 container material Substances 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D1/00—Evaporating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Toxicology (AREA)
- Materials Engineering (AREA)
- Health & Medical Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB08332412A GB2144317B (en) | 1983-07-21 | 1983-12-05 | Drying animals and collecting hair |
| FR8402592A FR2550054B1 (fr) | 1983-07-21 | 1984-02-21 | Appareil pour secher le pelage d'animaux domestiques |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3228311A DE3228311C2 (de) | 1982-07-29 | 1982-07-29 | Verdampfertiegel für Vakuum-Aufdampfanlagen |
| DE3228311.3 | 1982-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5938384A JPS5938384A (ja) | 1984-03-02 |
| JPH032948B2 true JPH032948B2 (enExample) | 1991-01-17 |
Family
ID=6169602
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58132021A Granted JPS5938384A (ja) | 1982-07-29 | 1983-07-21 | 真空蒸着装置のための蒸発容器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US4530100A (enExample) |
| JP (1) | JPS5938384A (enExample) |
| CH (1) | CH653372A5 (enExample) |
| DE (1) | DE3228311C2 (enExample) |
| FR (1) | FR2531104B1 (enExample) |
| GB (1) | GB2126255B (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4866239A (en) * | 1988-05-31 | 1989-09-12 | The Boc Group, Inc. | Vapor source assembly with crucible |
| US5111022A (en) * | 1989-08-23 | 1992-05-05 | Tfi Telemark | Cooling system for electron beam gun and method |
| JPH0765163B2 (ja) * | 1991-09-30 | 1995-07-12 | 株式会社シンクロン | ハースライナおよび蒸着方法 |
| US5473627A (en) * | 1992-11-05 | 1995-12-05 | Mdc Vacuum Products Corporation | UHV rotating fluid delivery system |
| JP2008240305A (ja) * | 2007-03-27 | 2008-10-09 | Sanwa Shutter Corp | 建具枠の躯体取付金具および躯体取付構造 |
| DE102019104988A1 (de) * | 2019-02-27 | 2020-08-27 | VON ARDENNE Asset GmbH & Co. KG | Versorgungsvorrichtung, Verfahren und Prozessieranordnung |
| KR102761515B1 (ko) * | 2019-02-27 | 2025-02-04 | 삼성디스플레이 주식회사 | 증착원 증발 장치 및 그 제조방법 |
| EP4384648A1 (en) | 2021-08-12 | 2024-06-19 | Applied Materials, Inc. | Evaporator for effective surface area evaporation |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2060936A (en) * | 1936-02-15 | 1936-11-17 | Todd Comb Equipment Inc | Heat exchange means |
| NL259959A (enExample) * | 1960-02-03 | |||
| DE1262101C2 (de) * | 1962-12-15 | 1973-10-25 | Tiegel fuer die verdampfung von stoffen im vakuum mittels elektronenstrahlen, insbesondere zur bandbedampfung | |
| US3414655A (en) * | 1966-01-26 | 1968-12-03 | Nat Res Corp | Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material |
| US3360600A (en) * | 1966-07-13 | 1967-12-26 | Air Reduction | Vapor source assembly |
| DE3010925A1 (de) * | 1980-03-21 | 1981-10-01 | Albrecht G. Prof. Dr. 4600 Dortmund Fischer | Gallium-gekuehlte elektronenstrahl-drehtiegel-vakuum-aufdampfanlage |
-
1982
- 1982-07-29 DE DE3228311A patent/DE3228311C2/de not_active Expired
-
1983
- 1983-04-27 CH CH2241/83A patent/CH653372A5/de not_active IP Right Cessation
- 1983-07-07 US US06/511,862 patent/US4530100A/en not_active Expired - Fee Related
- 1983-07-18 GB GB08319337A patent/GB2126255B/en not_active Expired
- 1983-07-21 JP JP58132021A patent/JPS5938384A/ja active Granted
- 1983-07-29 FR FR8312589A patent/FR2531104B1/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB8319337D0 (en) | 1983-08-17 |
| DE3228311A1 (de) | 1984-02-02 |
| FR2531104B1 (fr) | 1989-07-28 |
| CH653372A5 (de) | 1985-12-31 |
| FR2531104A1 (fr) | 1984-02-03 |
| JPS5938384A (ja) | 1984-03-02 |
| GB2126255A (en) | 1984-03-21 |
| DE3228311C2 (de) | 1984-07-05 |
| GB2126255B (en) | 1985-09-04 |
| US4530100A (en) | 1985-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4455504A (en) | Liquid cooled anode x-ray tubes | |
| JPH0647103B2 (ja) | 炭酸カルシウムを含有する水の処理用装置とこの装置で構成した設備 | |
| JP3758092B2 (ja) | 熱移動装置を有するｘ線発生装置 | |
| JPH032948B2 (enExample) | ||
| US5897059A (en) | Nozzle for use in a torch head of a plasma torch apparatus | |
| EP0127289B1 (en) | Distilling apparatus operating on the thermocompressor principle | |
| US20170126100A1 (en) | Motor structure capable of dissipating heat therein | |
| JPS5836671A (ja) | プラズマフレ−ム溶射ガン並びにプラズマフレ−ム溶射ガンのノズルの冷却法 | |
| EP0075014A1 (en) | Device with liquid-cooled anode. | |
| RU2543081C2 (ru) | Система коммутационного аппарата с раствором контактов | |
| CA1075201A (en) | Ozone generator | |
| US4508951A (en) | Fluid baffle assembly for a water-cooled welding torch | |
| US5983842A (en) | Vertical evaporator | |
| JPS6049002B2 (ja) | 薄膜蒸発器 | |
| US10110095B2 (en) | Motor structure capable of dissipating heat therein | |
| US3868236A (en) | Centrifugal gas-liquid separator | |
| US4778202A (en) | Tubular component made out of quartz glass with a flange | |
| US4108576A (en) | Low cost, thermally efficient diffusion pump | |
| US1929410A (en) | Cyclonic cooling tower | |
| US4424502A (en) | Transformer with a controlled flow of cooling liquid | |
| CA1331088C (en) | Plasma gun having improved anode cooling system | |
| EP0059662B1 (fr) | Dispositif de mélange homogène de liquides en écoulement à des températures différentes | |
| CA2117973C (en) | Non-baffled low pressure drop vacuum cooled inserted smelt spout | |
| US5983841A (en) | Heat exchanger | |
| US5009838A (en) | Internal pump for nuclear reactor |