FR2531104B1 - Creuset de vaporisation pour installations de depot de materiaux vaporises sous vide - Google Patents

Creuset de vaporisation pour installations de depot de materiaux vaporises sous vide

Info

Publication number
FR2531104B1
FR2531104B1 FR8312589A FR8312589A FR2531104B1 FR 2531104 B1 FR2531104 B1 FR 2531104B1 FR 8312589 A FR8312589 A FR 8312589A FR 8312589 A FR8312589 A FR 8312589A FR 2531104 B1 FR2531104 B1 FR 2531104B1
Authority
FR
France
Prior art keywords
material deposition
vaporized material
vaporization crucible
deposition plants
vacuum vaporized
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8312589A
Other languages
English (en)
French (fr)
Other versions
FR2531104A1 (fr
Inventor
Albert Feuerstein
Klaus-Jurgen Heimbach
Helmut Warscheit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold Heraeus GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Heraeus GmbH filed Critical Leybold Heraeus GmbH
Publication of FR2531104A1 publication Critical patent/FR2531104A1/fr
Application granted granted Critical
Publication of FR2531104B1 publication Critical patent/FR2531104B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D1/00—Evaporating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
FR8312589A 1982-07-29 1983-07-29 Creuset de vaporisation pour installations de depot de materiaux vaporises sous vide Expired FR2531104B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE3228311A DE3228311C2 (de) 1982-07-29 1982-07-29 Verdampfertiegel für Vakuum-Aufdampfanlagen

Publications (2)

Publication Number Publication Date
FR2531104A1 FR2531104A1 (fr) 1984-02-03
FR2531104B1 true FR2531104B1 (fr) 1989-07-28

Family

ID=6169602

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8312589A Expired FR2531104B1 (fr) 1982-07-29 1983-07-29 Creuset de vaporisation pour installations de depot de materiaux vaporises sous vide

Country Status (6)

Country Link
US (1) US4530100A (enExample)
JP (1) JPS5938384A (enExample)
CH (1) CH653372A5 (enExample)
DE (1) DE3228311C2 (enExample)
FR (1) FR2531104B1 (enExample)
GB (1) GB2126255B (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4866239A (en) * 1988-05-31 1989-09-12 The Boc Group, Inc. Vapor source assembly with crucible
US5111022A (en) * 1989-08-23 1992-05-05 Tfi Telemark Cooling system for electron beam gun and method
JPH0765163B2 (ja) * 1991-09-30 1995-07-12 株式会社シンクロン ハースライナおよび蒸着方法
US5473627A (en) * 1992-11-05 1995-12-05 Mdc Vacuum Products Corporation UHV rotating fluid delivery system
JP2008240305A (ja) * 2007-03-27 2008-10-09 Sanwa Shutter Corp 建具枠の躯体取付金具および躯体取付構造
DE102019104988A1 (de) * 2019-02-27 2020-08-27 VON ARDENNE Asset GmbH & Co. KG Versorgungsvorrichtung, Verfahren und Prozessieranordnung
KR102761515B1 (ko) * 2019-02-27 2025-02-04 삼성디스플레이 주식회사 증착원 증발 장치 및 그 제조방법
EP4384648A1 (en) 2021-08-12 2024-06-19 Applied Materials, Inc. Evaporator for effective surface area evaporation

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2060936A (en) * 1936-02-15 1936-11-17 Todd Comb Equipment Inc Heat exchange means
NL259959A (enExample) * 1960-02-03
DE1262101C2 (de) * 1962-12-15 1973-10-25 Tiegel fuer die verdampfung von stoffen im vakuum mittels elektronenstrahlen, insbesondere zur bandbedampfung
US3414655A (en) * 1966-01-26 1968-12-03 Nat Res Corp Apparatus for evaporation of low temperature semiconductor material by electron beam impingement on the material and comprising means for draining electric charge from the material
US3360600A (en) * 1966-07-13 1967-12-26 Air Reduction Vapor source assembly
DE3010925A1 (de) * 1980-03-21 1981-10-01 Albrecht G. Prof. Dr. 4600 Dortmund Fischer Gallium-gekuehlte elektronenstrahl-drehtiegel-vakuum-aufdampfanlage

Also Published As

Publication number Publication date
GB8319337D0 (en) 1983-08-17
DE3228311A1 (de) 1984-02-02
CH653372A5 (de) 1985-12-31
FR2531104A1 (fr) 1984-02-03
JPH032948B2 (enExample) 1991-01-17
JPS5938384A (ja) 1984-03-02
GB2126255A (en) 1984-03-21
DE3228311C2 (de) 1984-07-05
GB2126255B (en) 1985-09-04
US4530100A (en) 1985-07-16

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Legal Events

Date Code Title Description
ST Notification of lapse