FR2534933B1 - Cellule d'evaporation par effusion pour des installations de metallisation sous vide - Google Patents

Cellule d'evaporation par effusion pour des installations de metallisation sous vide

Info

Publication number
FR2534933B1
FR2534933B1 FR8316992A FR8316992A FR2534933B1 FR 2534933 B1 FR2534933 B1 FR 2534933B1 FR 8316992 A FR8316992 A FR 8316992A FR 8316992 A FR8316992 A FR 8316992A FR 2534933 B1 FR2534933 B1 FR 2534933B1
Authority
FR
France
Prior art keywords
damping
vacuum metallization
evaporation cell
plants
metallization plants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8316992A
Other languages
English (en)
Other versions
FR2534933A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
OC Oerlikon Balzers AG
Original Assignee
Balzers AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers AG filed Critical Balzers AG
Publication of FR2534933A1 publication Critical patent/FR2534933A1/fr
Application granted granted Critical
Publication of FR2534933B1 publication Critical patent/FR2534933B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR8316992A 1982-10-26 1983-10-25 Cellule d'evaporation par effusion pour des installations de metallisation sous vide Expired FR2534933B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH6224/82A CH651592A5 (de) 1982-10-26 1982-10-26 Dampfquelle fuer vakuumbedampfungsanlagen.

Publications (2)

Publication Number Publication Date
FR2534933A1 FR2534933A1 (fr) 1984-04-27
FR2534933B1 true FR2534933B1 (fr) 1985-07-19

Family

ID=4306235

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8316992A Expired FR2534933B1 (fr) 1982-10-26 1983-10-25 Cellule d'evaporation par effusion pour des installations de metallisation sous vide

Country Status (6)

Country Link
US (1) US4543467A (fr)
JP (1) JPS5993877A (fr)
CH (1) CH651592A5 (fr)
DE (2) DE8330196U1 (fr)
FR (1) FR2534933B1 (fr)
GB (1) GB2130252B (fr)

Families Citing this family (42)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH654596A5 (de) * 1983-09-05 1986-02-28 Balzers Hochvakuum Verdampferzelle.
JPS60225422A (ja) * 1984-04-24 1985-11-09 Hitachi Ltd 薄膜形成方法およびその装置
DE8502409U1 (de) * 1985-01-30 1986-06-05 Globol-Werk Gmbh, 8858 Neuburg Vorrichtung zum Verdampfen von in Zellstoff oder anderen Trägermaterialien eingelagerten Wirkstoffen, wie zum Beispiel Pyrethrum
KR930007853B1 (ko) * 1986-12-10 1993-08-20 후지 세이끼 가부시기 가이샤 진공 증발장치
US5156815A (en) * 1988-09-08 1992-10-20 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
US5080870A (en) * 1988-09-08 1992-01-14 Board Of Regents, The University Of Texas System Sublimating and cracking apparatus
DE59009909D1 (de) * 1989-04-19 1996-01-11 Siemens Ag Vorrichtung mit einem Tiegel in einer Effusionszelle einer Molekularstrahlepitaxieanlage.
US5034604A (en) * 1989-08-29 1991-07-23 Board Of Regents, The University Of Texas System Refractory effusion cell to generate a reproducible, uniform and ultra-pure molecular beam of elemental molecules, utilizing reduced thermal gradient filament construction
US5157240A (en) * 1989-09-13 1992-10-20 Chow Loren A Deposition heaters
US5031229A (en) * 1989-09-13 1991-07-09 Chow Loren A Deposition heaters
CA2031912A1 (fr) * 1989-12-22 1991-06-23 Robert Fred Pfost Couvercle chauffe
US6152074A (en) * 1996-10-30 2000-11-28 Applied Materials, Inc. Deposition of a thin film on a substrate using a multi-beam source
US5906857A (en) * 1997-05-13 1999-05-25 Ultratherm, Inc. Apparatus, system and method for controlling emission parameters attending vaporized in a HV environment
US6011904A (en) * 1997-06-10 2000-01-04 Board Of Regents, University Of Texas Molecular beam epitaxy effusion cell
US6162300A (en) * 1998-09-25 2000-12-19 Bichrt; Craig E. Effusion cell
EP1041169B1 (fr) * 1999-03-29 2007-09-26 ANTEC Solar Energy AG Dispositif et procédé pour revêtir des substrats par un procédé PVD
TW490714B (en) * 1999-12-27 2002-06-11 Semiconductor Energy Lab Film formation apparatus and method for forming a film
US20020011205A1 (en) * 2000-05-02 2002-01-31 Shunpei Yamazaki Film-forming apparatus, method of cleaning the same, and method of manufacturing a light-emitting device
US7517551B2 (en) * 2000-05-12 2009-04-14 Semiconductor Energy Laboratory Co., Ltd. Method of manufacturing a light-emitting device
SG113448A1 (en) * 2002-02-25 2005-08-29 Semiconductor Energy Lab Fabrication system and a fabrication method of a light emitting device
US7309269B2 (en) * 2002-04-15 2007-12-18 Semiconductor Energy Laboratory Co., Ltd. Method of fabricating light-emitting device and apparatus for manufacturing light-emitting device
US20040035360A1 (en) * 2002-05-17 2004-02-26 Semiconductor Energy Laboratory Co., Ltd. Manufacturing apparatus
TWI336905B (en) * 2002-05-17 2011-02-01 Semiconductor Energy Lab Evaporation method, evaporation device and method of fabricating light emitting device
US20030221620A1 (en) * 2002-06-03 2003-12-04 Semiconductor Energy Laboratory Co., Ltd. Vapor deposition device
US20040123804A1 (en) * 2002-09-20 2004-07-01 Semiconductor Energy Laboratory Co., Ltd. Fabrication system and manufacturing method of light emitting device
JP2004353083A (ja) * 2003-05-08 2004-12-16 Sanyo Electric Co Ltd 蒸発装置
JP2004353084A (ja) * 2003-05-08 2004-12-16 Sanyo Electric Co Ltd 蒸発装置の固定部材
JP2004353085A (ja) * 2003-05-08 2004-12-16 Sanyo Electric Co Ltd 蒸発装置
JP2004353082A (ja) * 2003-05-08 2004-12-16 Sanyo Electric Co Ltd 蒸発装置
JP2005029896A (ja) * 2003-07-04 2005-02-03 Agfa Gevaert Nv 原材料の蒸発のために使用されるるつぼのための改良されたアセンブリ
JP4442558B2 (ja) * 2005-01-06 2010-03-31 三星モバイルディスプレイ株式會社 蒸発源の加熱制御方法，蒸発源の冷却制御方法および蒸発源の制御方法
US20060185599A1 (en) * 2005-02-22 2006-08-24 Bichrt Craig E Effusion Cell Valve
FI118803B (fi) * 2005-04-22 2008-03-31 Beneq Oy Lähde, järjestely lähteen asentamiseksi sekä menetelmä lähteen asentamiseksi ja poistamiseksi
KR100645689B1 (ko) * 2005-08-31 2006-11-14 삼성에스디아이 주식회사 선형 증착원
KR100711886B1 (ko) * 2005-08-31 2007-04-25 삼성에스디아이 주식회사 무기 증착원 및 이의 가열원 제어방법
KR100711885B1 (ko) * 2005-08-31 2007-04-25 삼성에스디아이 주식회사 유기 증착원 및 이의 가열원 제어방법
WO2011065999A1 (fr) * 2008-12-18 2011-06-03 Veeco Instruments Inc. Source de déposition linéaire
US20100282167A1 (en) * 2008-12-18 2010-11-11 Veeco Instruments Inc. Linear Deposition Source
US20100159132A1 (en) * 2008-12-18 2010-06-24 Veeco Instruments, Inc. Linear Deposition Source
KR20120061394A (ko) * 2010-12-03 2012-06-13 삼성모바일디스플레이주식회사 증발원 및 유기물 증착 방법
US20190048460A1 (en) * 2017-08-14 2019-02-14 Wuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd. Evaporation Crucible and Evaporation System
CN108060392B (zh) * 2017-12-14 2023-07-18 深圳先进技术研究院 一种可控线性蒸发装置及镀膜方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1147775A (en) * 1913-06-30 1915-07-27 Antonio Zarella Apparatus for moistening cigars and tobacco.
US1990338A (en) * 1932-07-30 1935-02-05 Teco Mfg Corp Electric insecticide
FR872840A (fr) * 1940-06-04 1942-06-19 Fides Gmbh Procédé de revêtement de surfaces quelconques avec une couche métallique
DE747257C (de) * 1943-03-05 1944-09-18 Bosch Gmbh Robert Vorrichtung zur Metallisierung laufender Baender durch Metallbedampfung im Vakuum
US3105894A (en) * 1960-07-25 1963-10-01 Northern Electric Co Variable speed vaporizer
FR1451345A (fr) * 1964-06-30 1966-01-07 Ibm Source d'évaporation
FR1489583A (fr) * 1965-08-24 1967-07-21 United States Steel Corp Creuset pour la vaporisation de métaux comportant des parois verticales servant à contenir et à condenser la vapeur
US3751310A (en) * 1971-03-25 1973-08-07 Bell Telephone Labor Inc Germanium doped epitaxial films by the molecular beam method
US4061800A (en) * 1975-02-06 1977-12-06 Applied Materials, Inc. Vapor desposition method
US4010349A (en) * 1975-02-27 1977-03-01 Lincoln Manufacturing Company, Inc. Proofing cabinet
US3971334A (en) * 1975-03-04 1976-07-27 Xerox Corporation Coating device
DE2917841A1 (de) * 1979-05-03 1980-11-13 Leybold Heraeus Gmbh & Co Kg Verdampfer fuer vakuumaufdampfanlagen
DD151476A1 (de) * 1980-06-17 1981-10-21 Egon Goldammer Verdampferblende in bedampfungsanlagen

Also Published As

Publication number Publication date
GB8328451D0 (en) 1983-11-23
GB2130252A (en) 1984-05-31
DE3338061C2 (de) 1986-07-17
FR2534933A1 (fr) 1984-04-27
CH651592A5 (de) 1985-09-30
DE3338061A1 (de) 1984-05-17
US4543467A (en) 1985-09-24
GB2130252B (en) 1986-10-15
JPS5993877A (ja) 1984-05-30
JPH0241581B2 (fr) 1990-09-18
DE8330196U1 (de) 1987-06-04

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Legal Events

Date Code Title Description
ST Notification of lapse