JPS5931865A - カプセル型蒸発源 - Google Patents

カプセル型蒸発源

Info

Publication number
JPS5931865A
JPS5931865A JP13990682A JP13990682A JPS5931865A JP S5931865 A JPS5931865 A JP S5931865A JP 13990682 A JP13990682 A JP 13990682A JP 13990682 A JP13990682 A JP 13990682A JP S5931865 A JPS5931865 A JP S5931865A
Authority
JP
Japan
Prior art keywords
crucible
laser light
evaporation source
evaporated
capsule
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13990682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157907B2 (enrdf_load_stackoverflow
Inventor
Chikara Hayashi
林　主税
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Nihon Shinku Gijutsu KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc, Nihon Shinku Gijutsu KK filed Critical Ulvac Inc
Priority to JP13990682A priority Critical patent/JPS5931865A/ja
Publication of JPS5931865A publication Critical patent/JPS5931865A/ja
Publication of JPS6157907B2 publication Critical patent/JPS6157907B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
JP13990682A 1982-08-13 1982-08-13 カプセル型蒸発源 Granted JPS5931865A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13990682A JPS5931865A (ja) 1982-08-13 1982-08-13 カプセル型蒸発源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13990682A JPS5931865A (ja) 1982-08-13 1982-08-13 カプセル型蒸発源

Publications (2)

Publication Number Publication Date
JPS5931865A true JPS5931865A (ja) 1984-02-21
JPS6157907B2 JPS6157907B2 (enrdf_load_stackoverflow) 1986-12-09

Family

ID=15256377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13990682A Granted JPS5931865A (ja) 1982-08-13 1982-08-13 カプセル型蒸発源

Country Status (1)

Country Link
JP (1) JPS5931865A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63137162A (ja) * 1986-11-28 1988-06-09 Mitsubishi Electric Corp レ−ザ蒸着式多層膜形成装置
WO2007065685A1 (de) * 2005-12-07 2007-06-14 Novaled Ag Verfahren zum abscheiden eines aufdampfmaterials
JP2008524991A (ja) * 2004-12-24 2008-07-17 フナ ホールディングズ ピーティーワイ リミテッド オン ビハーフ オブ エッチジェイ ファミリー トラスト 海鳥の混獲の減少

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6396809U (enrdf_load_stackoverflow) * 1986-12-12 1988-06-22

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63137162A (ja) * 1986-11-28 1988-06-09 Mitsubishi Electric Corp レ−ザ蒸着式多層膜形成装置
JP2008524991A (ja) * 2004-12-24 2008-07-17 フナ ホールディングズ ピーティーワイ リミテッド オン ビハーフ オブ エッチジェイ ファミリー トラスト 海鳥の混獲の減少
WO2007065685A1 (de) * 2005-12-07 2007-06-14 Novaled Ag Verfahren zum abscheiden eines aufdampfmaterials
EP1798306A1 (de) * 2005-12-07 2007-06-20 Novaled AG Verfahren zum Abscheiden eines Aufdampfmaterials
EP1939320A2 (de) 2005-12-07 2008-07-02 Novaled AG Verfahren zum Abscheiden eines Aufdampfmaterials
EP1939320A3 (de) * 2005-12-07 2008-09-17 Novaled AG Verfahren zum Abscheiden eines Aufdampfmaterials
US8227029B2 (en) * 2005-12-07 2012-07-24 Novaled Ag Method for depositing a vapour deposition material

Also Published As

Publication number Publication date
JPS6157907B2 (enrdf_load_stackoverflow) 1986-12-09

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