JPS5931865A - Capsule type evaporating source - Google Patents

Abstract

PURPOSE:To utilize effectively an evaporating material by providing a top seal which is easily broken down by heating or internal pressure into a crucible which consists of a material permitting absorption or transmission of almost all portion of laser light and contains therein a material to be evaporated. CONSTITUTION:A crucible 1 is formed of a material that absorbs almost all portion of laser light, for example, carbon or graphite or a material that allows the transmission of laser light, for example, quartz or the like, and a top seal 2 consisting of a material which is easily broken down by heating or internal pressure, for example, a thin film of quartz or the like is provided in said crucible. A material 3 to be evaporated is charged into the crucible 1, and is held in a water cooled shroud 4 via a heat shield 5. An illumination window for laser light penetrating the shroud 4 and the shield 5 is provided. The laser light 8 irradiated through optical fiber 7 is converged by a convergent lens 8, and is conducted through the irradiation window to the side wall of the crucible 1, so that the material 3 in the crucible 1 is evaporated.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a novel evaporation source, particularly a capsule-type evaporation source containing a fixed amount of evaporation substance ◇ Conventionally known evaporation sources consist of a filament or e, consisting of a substance to be evaporated. Many structures are used in which the vapor deposition is carried out by returning to the boat where the vapor is stored and then elevating the material to conduct the vapor deposition. These known evaporation sources require a complicated insulation structure for the filament part 2 and the current-carrying part, and furthermore, there are many unexpected accidents such as filament breakage and poor insulation, and they are not recognized as reliable evaporation sources. When a single piece is large in size and requires the use of multiple evaporation sources, it is not possible to use a pressure device near the substrate to be evaporated, and a large amount of evaporation material is required to form a certain amount of film thickness. There are various drawbacks such as.

As a result of various studies to improve the above-mentioned drawbacks of known evaporation sources, we have succeeded in developing a capsule-type evaporation source with a new configuration that utilizes laser light with an optical fiber mechanism, and the present invention ．． The present invention provides a capsule-type evaporation source having a structure as specified in each item of the scope of the present invention.

The invention will now be described in more detail with reference to the accompanying drawings, which show some examples of embodiments of the invention.

FIG. 1 is a sectional view showing an example of the capsule-type evaporation source of the present invention, and 1 is a crucible made of a material that absorbs or transmits laser light. In addition, the moon that can absorb laser light1
Examples of the material include carbon or graphite, and CD quartz as a material that can be permeated. i! 1λ1 Figure A1 graphite crucible, (41
1E C・Yoran n-(t, ancer) t'-re-1 r1 force 1 order J more easily destroys 1. The evaporated material rj3 is added to the old seal 2 made of the old tooth 1 to be obtained. FIG. 1 B V, 1 is a quartz crucible, and the LC can easily be destroyed by the internal pressure generated during crucible heating. A top seal 1' made of a thin quartz film is used to seal J'J.

The capsule-type evaporation source of the present invention has the configuration as described in ``2''. explain.

Ml, 2 [Xl (ζ)] This is a tl, li metamorphic diagram when the laser beam is irradiated from the side of the crucible 1.pt.
A crucible 1 charged with li evaporate 'pi 3 and stopped by a top seal 2 is held in a water-cooled shroud 4 via a heat shield 5.

A 1/- single-light irradiation window 6 is provided that penetrates the water-cooling shroud 4 and the heat shield 5, and the laser beam 8 emitted from the optical fiber/z-7 is focused by a focusing lens 9 or the like.
The radiation is irradiated onto the side wall of the crucible 1 to heat the crucible 1 wall, or is transmitted through the crucible wall to heat and evaporate the evaporated substance.

Fig. 3 ij It is the same as Fig. 2, but has a structure in which the radar light 8 is irradiated from the bottom of the crucible, and the same reference numerals indicate the same members.In Fig. 6, 10 is a heat-insulating ceramic It is.

Figures 4 to 6 d are schematic diagrams showing an example of the use of the evaporation source of the present invention (1). Figure 4 shows 116 evaporation sources of the present invention arranged centripetally with respect to the substrate 12 to be deposited. As mentioned above, the evaporation source of the present invention can be installed and miniaturized for a long time.
The distance between the evaporation source group 11 and the substrate 12 (IL) can be reduced to, for example, 60 mm, and the installation width of the evaporation source group can be reduced to about 1
It is a supercooled condenser with a temperature of 0.0 to 1,4 which can reduce the waste of evaporated material and efficiently produce a deposited film on the substrate surface. , and between each evaporator 14 < 11 to prevent mutual contamination between the evaporation sources.

@Figure 5 shows an example in which the evaporation source 11 of the present invention is installed via a supercooling condenser 13, in which the distance between the evaporation source 11 and the substrate 12 is made small as in the example shown in Figure 4, and each evaporation source 11
Furthermore, by moving either the substrate 12 or the evaporation source 11, a different type of gold maple film or alloy film can be vapor-deposited on the substrate 12.

FIG. 6 shows how the small evaporation source 11 of the present invention is connected to the manipulator 14.
By holding it at the tip of the substrate 1 and using it together with the mask 15
2 is a schematic diagram showing an example in which a deposited film can be grown while moving an evaporation source 11 to a specific position in FIG.

7'+-, 2 Figure 1 view (direct +'f=, 10 V decoy graphite crucible, after reducing the pressure inside the crucible, 50
The entire crucible was heated by irradiation with a W YAG laser. At this time, the maximum temperature of the entire crucible was 630'C. 15 above the crucible when the crucible temperature is 300'C
At the position of 0 m1, the vapor partial pressure tj of As is 1 x 10 Torr, and KAs and Ga are deposited on the substrate (GaAs), and a vapor partial pressure sufficient for the growth of a GaA, S film suitable for optical ICs is obtained. Ta.

As detailed above, the evaporation source of the present invention has a simple structure1, and can be made into a small evaporation source.Therefore, the distance between the evaporation source and the substrate can be shortened, and the evaporation source group can be formed into a small space. - It can also be installed alongside a space, so evaporated materials can be used without waste. In addition, since the evaporation sources can be arranged in a narrow space, n evaporation materials can be used simultaneously to easily grow a composite thin film layer or an alloy film, and other effects not found in conventional products are achieved. It's something you get.

[Brief explanation of the drawing]

Fig. 1 is a schematic cross-sectional view showing an example of the capsule-type evaporation source of the present invention, Fig. 2, and Fig. 6 are schematic views showing the mode of irradiating the capsule-type evaporation source of the present invention with laser light, and Figs. 4 to 6. 1 is a schematic layout diagram showing an example of the use of the capsule-type evaporation source of the present invention. In the diagram, 1 is a crucible, 2 is a top seal, 4 is the actual material to be evaporated, 4 is a water cooling shroud, 5 is a heat shield, and 6 is an irradiation window. . 7 is an optical fiber, 8 is a laser beam, 9 is a condenser lens, 10 is a heat insulating ceramic, 11 is an evaporation source group,
12 is the board, 15 is the supercooled condenser.
4 i17:=PyuL'-ta, 15H-rSuf respectively, Fig. 1A B Fig. 2 Fig. 4 Ego~12 Fig. 5

Claims (1)

[Scope of Claims] fil A capsule characterized in that a crucible made of a material capable of absorbing or transmitting most of laser light and charged with a substance to be evaporated is provided with a top seal that can be easily destroyed by heating or internal pressure. type evaporation source. (2) Optical fire z- for irradiating the crucible with laser light
A capsule-type evaporation source according to claim 1, which is provided with a sidewall. +31 A capsule-type evaporation source according to Patent h (Required Item 1), which is also equipped with a light condensing mechanism to the top seal portion of the evaporation source.