JPS5928570A - 真空装置用治具 - Google Patents

真空装置用治具

Info

Publication number
JPS5928570A
JPS5928570A JP13766682A JP13766682A JPS5928570A JP S5928570 A JPS5928570 A JP S5928570A JP 13766682 A JP13766682 A JP 13766682A JP 13766682 A JP13766682 A JP 13766682A JP S5928570 A JPS5928570 A JP S5928570A
Authority
JP
Japan
Prior art keywords
jig
base material
main body
deposited
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13766682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141986B2 (enExample
Inventor
Sadaji Inoue
井上　貞二
Takao Matsudaira
松平　他家夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP13766682A priority Critical patent/JPS5928570A/ja
Publication of JPS5928570A publication Critical patent/JPS5928570A/ja
Publication of JPS6141986B2 publication Critical patent/JPS6141986B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP13766682A 1982-08-06 1982-08-06 真空装置用治具 Granted JPS5928570A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13766682A JPS5928570A (ja) 1982-08-06 1982-08-06 真空装置用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13766682A JPS5928570A (ja) 1982-08-06 1982-08-06 真空装置用治具

Publications (2)

Publication Number Publication Date
JPS5928570A true JPS5928570A (ja) 1984-02-15
JPS6141986B2 JPS6141986B2 (enExample) 1986-09-18

Family

ID=15203971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13766682A Granted JPS5928570A (ja) 1982-08-06 1982-08-06 真空装置用治具

Country Status (1)

Country Link
JP (1) JPS5928570A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022069171A1 (de) * 2020-09-30 2022-04-07 Oerlikon Surface Solutions Ag, Pfäffikon Federhalterung und werkstückträger

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022069171A1 (de) * 2020-09-30 2022-04-07 Oerlikon Surface Solutions Ag, Pfäffikon Federhalterung und werkstückträger
CN116802339A (zh) * 2020-09-30 2023-09-22 欧瑞康表面解决方案股份公司，普费菲孔 弹簧支架和工件承载件
JP2023543509A (ja) * 2020-09-30 2023-10-16 エリコン・サーフェス・ソリューションズ・アクチェンゲゼルシャフト，プフェフィコーン ばねホルダおよび被加工物担持体

Also Published As

Publication number Publication date
JPS6141986B2 (enExample) 1986-09-18

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