JPS6141986B2 - - Google Patents

Info

Publication number
JPS6141986B2
JPS6141986B2 JP13766682A JP13766682A JPS6141986B2 JP S6141986 B2 JPS6141986 B2 JP S6141986B2 JP 13766682 A JP13766682 A JP 13766682A JP 13766682 A JP13766682 A JP 13766682A JP S6141986 B2 JPS6141986 B2 JP S6141986B2
Authority
JP
Japan
Prior art keywords
jig
deposited
main body
base material
holding member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13766682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5928570A (ja
Inventor
Sadaji Inoe
Takao Matsudaira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP13766682A priority Critical patent/JPS5928570A/ja
Publication of JPS5928570A publication Critical patent/JPS5928570A/ja
Publication of JPS6141986B2 publication Critical patent/JPS6141986B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Physical Vapour Deposition (AREA)
JP13766682A 1982-08-06 1982-08-06 真空装置用治具 Granted JPS5928570A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13766682A JPS5928570A (ja) 1982-08-06 1982-08-06 真空装置用治具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13766682A JPS5928570A (ja) 1982-08-06 1982-08-06 真空装置用治具

Publications (2)

Publication Number Publication Date
JPS5928570A JPS5928570A (ja) 1984-02-15
JPS6141986B2 true JPS6141986B2 (enExample) 1986-09-18

Family

ID=15203971

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13766682A Granted JPS5928570A (ja) 1982-08-06 1982-08-06 真空装置用治具

Country Status (1)

Country Link
JP (1) JPS5928570A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020125504A1 (de) * 2020-09-30 2022-03-31 Oerlikon Surface Solutions Ag, Pfäffikon Federhalterung und werkstückträger

Also Published As

Publication number Publication date
JPS5928570A (ja) 1984-02-15

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