JPS5925396B2 - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS5925396B2 JPS5925396B2 JP49004982A JP498274A JPS5925396B2 JP S5925396 B2 JPS5925396 B2 JP S5925396B2 JP 49004982 A JP49004982 A JP 49004982A JP 498274 A JP498274 A JP 498274A JP S5925396 B2 JPS5925396 B2 JP S5925396B2
- Authority
- JP
- Japan
- Prior art keywords
- gap
- substrate
- protective film
- diffusion
- depth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Led Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49004982A JPS5925396B2 (ja) | 1974-01-07 | 1974-01-07 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49004982A JPS5925396B2 (ja) | 1974-01-07 | 1974-01-07 | 半導体装置の製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59027048A Division JPS59161019A (ja) | 1984-02-17 | 1984-02-17 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50102260A JPS50102260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-08-13 |
| JPS5925396B2 true JPS5925396B2 (ja) | 1984-06-16 |
Family
ID=11598793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49004982A Expired JPS5925396B2 (ja) | 1974-01-07 | 1974-01-07 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5925396B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5721824A (en) * | 1980-07-14 | 1982-02-04 | Fujitsu Ltd | Manufacture of semiconductor device |
-
1974
- 1974-01-07 JP JP49004982A patent/JPS5925396B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS50102260A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1975-08-13 |
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