JPS59232932A - 光フアイバ用プリフオ−ムの製造方法 - Google Patents
光フアイバ用プリフオ−ムの製造方法Info
- Publication number
- JPS59232932A JPS59232932A JP10721683A JP10721683A JPS59232932A JP S59232932 A JPS59232932 A JP S59232932A JP 10721683 A JP10721683 A JP 10721683A JP 10721683 A JP10721683 A JP 10721683A JP S59232932 A JPS59232932 A JP S59232932A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- refractive index
- center
- ejected
- preform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/30—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi
- C03B2201/31—Doped silica-based glasses doped with metals, e.g. Ga, Sn, Sb, Pb or Bi doped with germanium
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/04—Multi-nested ports
- C03B2207/06—Concentric circular ports
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2207/00—Glass deposition burners
- C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
- C03B2207/26—Multiple ports for glass precursor
- C03B2207/28—Multiple ports for glass precursor for different glass precursors, reactants or modifiers
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10721683A JPS59232932A (ja) | 1983-06-15 | 1983-06-15 | 光フアイバ用プリフオ−ムの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10721683A JPS59232932A (ja) | 1983-06-15 | 1983-06-15 | 光フアイバ用プリフオ−ムの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59232932A true JPS59232932A (ja) | 1984-12-27 |
| JPS6144821B2 JPS6144821B2 (OSRAM) | 1986-10-04 |
Family
ID=14453427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10721683A Granted JPS59232932A (ja) | 1983-06-15 | 1983-06-15 | 光フアイバ用プリフオ−ムの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59232932A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010173923A (ja) * | 2009-02-02 | 2010-08-12 | Sumitomo Electric Ind Ltd | 多孔質ガラス母材の製造方法 |
| WO2010098352A1 (ja) * | 2009-02-24 | 2010-09-02 | 旭硝子株式会社 | 多孔質石英ガラス体の製造方法およびeuvリソグラフィ用光学部材 |
-
1983
- 1983-06-15 JP JP10721683A patent/JPS59232932A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010173923A (ja) * | 2009-02-02 | 2010-08-12 | Sumitomo Electric Ind Ltd | 多孔質ガラス母材の製造方法 |
| WO2010098352A1 (ja) * | 2009-02-24 | 2010-09-02 | 旭硝子株式会社 | 多孔質石英ガラス体の製造方法およびeuvリソグラフィ用光学部材 |
| US8356494B2 (en) | 2009-02-24 | 2013-01-22 | Asahi Glass Company, Limited | Process for producing porous quartz glass object, and optical member for EUV lithography |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6144821B2 (OSRAM) | 1986-10-04 |
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