JPS59229891A - 半導体レ−ザの製造方法 - Google Patents

半導体レ−ザの製造方法

Info

Publication number
JPS59229891A
JPS59229891A JP58105348A JP10534883A JPS59229891A JP S59229891 A JPS59229891 A JP S59229891A JP 58105348 A JP58105348 A JP 58105348A JP 10534883 A JP10534883 A JP 10534883A JP S59229891 A JPS59229891 A JP S59229891A
Authority
JP
Japan
Prior art keywords
layer
waveguide layer
waveguide
confinement
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58105348A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0526359B2 (enrdf_load_stackoverflow
Inventor
Masahiro Morimoto
森本　正弘
Haruo Nagai
治男 永井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Fujitsu Ltd
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd, Nippon Telegraph and Telephone Corp filed Critical Fujitsu Ltd
Priority to JP58105348A priority Critical patent/JPS59229891A/ja
Publication of JPS59229891A publication Critical patent/JPS59229891A/ja
Publication of JPH0526359B2 publication Critical patent/JPH0526359B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/12—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region the resonator having a periodic structure, e.g. in distributed feedback [DFB] lasers

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Semiconductor Lasers (AREA)
JP58105348A 1983-06-13 1983-06-13 半導体レ−ザの製造方法 Granted JPS59229891A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58105348A JPS59229891A (ja) 1983-06-13 1983-06-13 半導体レ−ザの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58105348A JPS59229891A (ja) 1983-06-13 1983-06-13 半導体レ−ザの製造方法

Publications (2)

Publication Number Publication Date
JPS59229891A true JPS59229891A (ja) 1984-12-24
JPH0526359B2 JPH0526359B2 (enrdf_load_stackoverflow) 1993-04-15

Family

ID=14405225

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58105348A Granted JPS59229891A (ja) 1983-06-13 1983-06-13 半導体レ−ザの製造方法

Country Status (1)

Country Link
JP (1) JPS59229891A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164380A (ja) * 1984-02-06 1985-08-27 Nec Corp 半導体レ−ザの製造方法
JPS624386A (ja) * 1985-07-01 1987-01-10 Fujitsu Ltd 化合物半導体装置の製造方法
JP2011022547A (ja) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd 回折格子の形成方法
JP2011029667A (ja) * 1996-03-22 2011-02-10 Philips Lumileds Lightng Co Llc 発光素子

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60164380A (ja) * 1984-02-06 1985-08-27 Nec Corp 半導体レ−ザの製造方法
JPS624386A (ja) * 1985-07-01 1987-01-10 Fujitsu Ltd 化合物半導体装置の製造方法
JP2011029667A (ja) * 1996-03-22 2011-02-10 Philips Lumileds Lightng Co Llc 発光素子
JP2011022547A (ja) * 2009-06-17 2011-02-03 Sumitomo Electric Ind Ltd 回折格子の形成方法

Also Published As

Publication number Publication date
JPH0526359B2 (enrdf_load_stackoverflow) 1993-04-15

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