JPS59220913A - チタンジルコン酸鉛誘電体薄膜の製造方法 - Google Patents

チタンジルコン酸鉛誘電体薄膜の製造方法

Info

Publication number
JPS59220913A
JPS59220913A JP9484083A JP9484083A JPS59220913A JP S59220913 A JPS59220913 A JP S59220913A JP 9484083 A JP9484083 A JP 9484083A JP 9484083 A JP9484083 A JP 9484083A JP S59220913 A JPS59220913 A JP S59220913A
Authority
JP
Japan
Prior art keywords
thin film
lead
titanium zirconate
titanium
dielectric thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9484083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318281B2 (enrdf_load_stackoverflow
Inventor
吉原　仁夫
一郎 菊地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Soda Co Ltd
Original Assignee
Nippon Soda Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Soda Co Ltd filed Critical Nippon Soda Co Ltd
Priority to JP9484083A priority Critical patent/JPS59220913A/ja
Priority to EP19840900646 priority patent/EP0134249A4/en
Priority to PCT/JP1984/000027 priority patent/WO1984003003A1/ja
Priority to US06/662,295 priority patent/US4636908A/en
Publication of JPS59220913A publication Critical patent/JPS59220913A/ja
Publication of JPH0318281B2 publication Critical patent/JPH0318281B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Insulating Materials (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
JP9484083A 1983-01-31 1983-05-31 チタンジルコン酸鉛誘電体薄膜の製造方法 Granted JPS59220913A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP9484083A JPS59220913A (ja) 1983-05-31 1983-05-31 チタンジルコン酸鉛誘電体薄膜の製造方法
EP19840900646 EP0134249A4 (en) 1983-01-31 1984-01-31 PROCESS FOR PRODUCING A THIN FILM DIELECTRIC.
PCT/JP1984/000027 WO1984003003A1 (en) 1983-01-31 1984-01-31 Thin-film dielectric and process for its production
US06/662,295 US4636908A (en) 1983-01-31 1984-01-31 Thin-film dielectric and process for its production

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9484083A JPS59220913A (ja) 1983-05-31 1983-05-31 チタンジルコン酸鉛誘電体薄膜の製造方法

Publications (2)

Publication Number Publication Date
JPS59220913A true JPS59220913A (ja) 1984-12-12
JPH0318281B2 JPH0318281B2 (enrdf_load_stackoverflow) 1991-03-12

Family

ID=14121234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9484083A Granted JPS59220913A (ja) 1983-01-31 1983-05-31 チタンジルコン酸鉛誘電体薄膜の製造方法

Country Status (1)

Country Link
JP (1) JPS59220913A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200403A (ja) * 1984-03-24 1985-10-09 日本曹達株式会社 薄膜誘電体の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147312A (en) * 1980-04-15 1981-11-16 Citizen Watch Co Ltd Method of manufacturing ferrodielectric thin film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56147312A (en) * 1980-04-15 1981-11-16 Citizen Watch Co Ltd Method of manufacturing ferrodielectric thin film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200403A (ja) * 1984-03-24 1985-10-09 日本曹達株式会社 薄膜誘電体の製造方法

Also Published As

Publication number Publication date
JPH0318281B2 (enrdf_load_stackoverflow) 1991-03-12

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